NONLINEAR DEFLECTION ANALYSIS OF ELECTROSTATIC MICRO-ACTUATORS WITH DIFFERENT ELECTRODE AND BEAM SHAPES

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HSU M.H.

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Journal Paper

Paper Information

Journal: IRANIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING (IJECE) Year:2007 | Volume:6 | Issue:1 Page(s): 73-79

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Title

NONLINEAR DEFLECTION ANALYSIS OF ELECTROSTATIC MICRO-ACTUATORS WITH DIFFERENT ELECTRODE AND BEAM SHAPES

Author(s)

HSU M.H. | Issue Writer Certificate

Keywords

MICRO-BEAM

MICROELECTROMECHANICAL SYSTEM

ELECTROSTATIC

SQUEEZE FILM FORCE

DIFFERENTIAL QUADRATURE METHOD

RESIDUAL AXIAL LOADING

Abstract

The nonlinear pull-in behavior for different ELECTROSTATIC micro-actuators is simulated in this work. The difficulty of nonlinear equation is overcome using the DIFFERENTIAL QUADRATURE METHOD and Wilson−q method. Several characteristics of different combination of shaped fixed-fixed beam and curved electrode are also observed to optimize the design in this paper. The nonlinear deflection of uniform actuator and non-uniform actuator solved using the DIFFERENTIAL QUADRATURE METHODs are efficient. The stresses are determined for this par ELECTROSTATIC micro-actuator design. The effects of applied voltage, SQUEEZE FILM FORCE, external loading and RESIDUAL AXIAL LOADING on the behavior of the ELECTROSTATIC actuator are investigated. It is needed to consider the SQUEEZE FILM FORCE and RESIDUAL AXIAL LOADING in the fixedfixed micro-actuator design.

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APA: Copy

HSU, M.H.. (2007). NONLINEAR DEFLECTION ANALYSIS OF ELECTROSTATIC MICRO-ACTUATORS WITH DIFFERENT ELECTRODE AND BEAM SHAPES. IRANIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING (IJECE), 6(1), 73-79. SID. https://sid.ir/paper/283413/en

Vancouver: Copy

HSU M.H.. NONLINEAR DEFLECTION ANALYSIS OF ELECTROSTATIC MICRO-ACTUATORS WITH DIFFERENT ELECTRODE AND BEAM SHAPES. IRANIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING (IJECE)[Internet]. 2007;6(1):73-79. Available from: https://sid.ir/paper/283413/en

IEEE: Copy

M.H. HSU, “NONLINEAR DEFLECTION ANALYSIS OF ELECTROSTATIC MICRO-ACTUATORS WITH DIFFERENT ELECTRODE AND BEAM SHAPES,” IRANIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING (IJECE), vol. 6, no. 1, pp. 73–79, 2007, [Online]. Available: https://sid.ir/paper/283413/en

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