Among the hard coatings, TiN and TiCN, due to their superior hardness, high wear resistance and low friction coefficients could enhance the lifetime of the tools, in some cases, more than ten times.The microstructure, hardness and tribological properties of TiN and TiCN are significantly related to method of coating. Until now, no scientific work has been done on TiN, TiCN and TiN-TiCN-TiN coatings, deposited by EB- PVD technique. In this research, after conventional heat treatment of D2 tool steel, the coating process was done on as polished substrates. Then, using SEM and AFM microspores, XRD and ball on disk exams, microstructure, hardness and theological behavior of the samples were investigated.From X-ray diffraction data using the Scherrer equation was determined that the EB-PVD coatings with 2-3 mn thickness had microstructures with the grain size in the range of 5 to 6 nm. The results of nanoindenter tests and wear experiments clarified that TiCN and TiN had the highest and lowest hardness and wear resistance, respectively. Also, Using the AFM images and roughness curves obtained that the roughness of the coatings were 12, 22 and 29 nanometer for TiN, TiCN and TiN- TiCN- TiN coatings, respectively.