Nanostructured Zr3Co intennetallic getter compound, due to its high surface area, show enhanced pumping properties and gas sorption response in contrast to the bulk, thin film and commercial getters. Nanostructured Zr3Co intennetallic powders were produced by mechanical alloying (MA) ofthe elemental powders. In the production process, the weight ratio of balls to powder was 1:15 and the rotation speed of planetary ball mill considered as 300rpm After 16 hours of milling, amorphous powder white desired compound was obtained. The phase evolution, microstructural characteristics and formation mechanism of Zr3Co powders during mechanical alloying were studied by means of X- ray diffraction method, scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and transmission electron microscopy (TEM). The results showed that after an optimum mechanical alloying time and optimum heat treatment, nanostructured Zr3Co intennetallic powder was achieved. The crystallite grains with sizes of 10 to 20 nm, was achieved respectively. It was found that Zr3Co intennetallic compound is formed by the diffusion of Cobalt into Zirconium during mechanical alloying. In the second stage, after an optimum heat treatment, formation and growth of ZrjCo intennetallic compound are controlled by interdiffusion of Co and Zr.