In this process after making proper chamber to produce plasma in d.c. Glow regime and readiness of samples and doing microhardness and PIXE analyzes, samples nitriding began in different conditions. The hardness changes and the depth of hardened layer of 321, 316 and 304 steels are studied as a function of discharge parameters [8, 9]. The plasma was produced using a mixture of N2 and H2 gases at glow discharge regime. The gas composition varied between 0.25< [n (H2)]/ [n (N2)]< 0.5, the sample temperature 300°C<T<400°C, And the gas pressure 300mtorr < p <1000 mtorr. Up to 450% increase in hardness was observed in this range of discharge parameters. XRD, GDS, SEM, RBS, PIXE and MICROHARDNESS tests are used for layer analyzing .RBS analyze determined hardened layer thickness up to 1700 A (Max). 20% Nitrogen concentration in nitrided zone and g,a -7 gN phase transformation were observed due to PIXE, GDS, XRD and SEM results.