THE EFFECT OF SUBSTRATE TEMPERATURE ON THE NANO-STRUCTURAL PROPERTIES OF ZRN LAYER

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KIANI M.; TANHAIE AHARI M.R.; MOJTAHEDZADEH LARIJANI M.

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Journal: IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING Year:2012 | Volume:- | Issue:12 Page(s): 17-23

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Title

THE EFFECT OF SUBSTRATE TEMPERATURE ON THE NANO-STRUCTURAL PROPERTIES OF ZRN LAYER

Author(s)

KIANI M. | TANHAIE AHARI M.R. | MOJTAHEDZADEH LARIJANI M. | Issue Writer Certificate

Keywords

ZIRCONIUM NITRIDEQ2

ION BEAM SPUTTERINGQ3

COATINGQ3

XRDQ3

RBSQ3

Abstract

In this study the effect of substrate temperature on the structural properties of ZIRCONIUM NITRIDE (ZrN) COATINGs prepared by ION BEAM SPUTTERING on the glass and silicon substrates was investigated. Rutherford Back Scattering (RBS) and X-Ray Diffraction (XRD) analyses were performed to evaluate the COATING thickness and structure respectively. The ZrN COATINGs presented a preferential crystalline orientation following the [111] axis at all temperatures. RBS results showed an increase in COATING thickness with the increase of temperature up to 400oC due to reaction kinetic for the formation of Zr-N monomers. The decrease of thickness at 450oC is probably due to the increase in COATING density and decrease in grain size at this temperature.

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APA: Copy

KIANI, M., TANHAIE AHARI, M.R., & MOJTAHEDZADEH LARIJANI, M.. (2012). THE EFFECT OF SUBSTRATE TEMPERATURE ON THE NANO-STRUCTURAL PROPERTIES OF ZRN LAYER. IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING, -(12), 17-23. SID. https://sid.ir/paper/121124/en

Vancouver: Copy

KIANI M., TANHAIE AHARI M.R., MOJTAHEDZADEH LARIJANI M.. THE EFFECT OF SUBSTRATE TEMPERATURE ON THE NANO-STRUCTURAL PROPERTIES OF ZRN LAYER. IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING[Internet]. 2012;-(12):17-23. Available from: https://sid.ir/paper/121124/en

IEEE: Copy

M. KIANI, M.R. TANHAIE AHARI, and M. MOJTAHEDZADEH LARIJANI, “THE EFFECT OF SUBSTRATE TEMPERATURE ON THE NANO-STRUCTURAL PROPERTIES OF ZRN LAYER,” IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING, vol. -, no. 12, pp. 17–23, 2012, [Online]. Available: https://sid.ir/paper/121124/en

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