DESIGN SYNTHESIS OF A CAPACITIVE TYPE MEMS ACCELEROMETER

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MAHJOUB M.J.; ABOU ALGHASEMI AZAD A.

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

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Journal: Year:2006 | Volume:39 | Issue:6 (94) Page(s): 745-752

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Title

DESIGN SYNTHESIS OF A CAPACITIVE TYPE MEMS ACCELEROMETER

Author(s)

MAHJOUB M.J. | ABOU ALGHASEMI AZAD A. | Issue Writer Certificate

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Abstract

In this paper, a capacitive type MEMS accelerometer is designed based on surface micromachining technology. The synthesis is limited to the mechanical part not the electronic conditioning circuits. A lateral comb type transducer is selected. The design layout is based on manufacturing limitations of MUMPs; a surface micromachining technology for polysilicon. The sensor parameters were obtained for an automotive application in the airbag systems. To reach the desired bandwidth and good stability, a (force) feedback system was used applying negative stiffness. The comb spring stiffness was derived analytically. A finite element analysis was also conducted to verify the results. Other performance characteristics of the sensor such as shock resistance and transverse sensitivity (which were complicated to drive analytically) were calculated by finite element simulation within an optimization algorithm to meet the required sensor specifications.

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APA: Copy

MAHJOUB, M.J., & ABOU ALGHASEMI AZAD, A.. (2006). DESIGN SYNTHESIS OF A CAPACITIVE TYPE MEMS ACCELEROMETER. JOURNAL OF FACULTY OF ENGINEERING (UNIVERSITY OF TEHRAN), 39(6 (94)), 745-752. SID. https://sid.ir/paper/14058/en

Vancouver: Copy

MAHJOUB M.J., ABOU ALGHASEMI AZAD A.. DESIGN SYNTHESIS OF A CAPACITIVE TYPE MEMS ACCELEROMETER. JOURNAL OF FACULTY OF ENGINEERING (UNIVERSITY OF TEHRAN)[Internet]. 2006;39(6 (94)):745-752. Available from: https://sid.ir/paper/14058/en

IEEE: Copy

M.J. MAHJOUB, and A. ABOU ALGHASEMI AZAD, “DESIGN SYNTHESIS OF A CAPACITIVE TYPE MEMS ACCELEROMETER,” JOURNAL OF FACULTY OF ENGINEERING (UNIVERSITY OF TEHRAN), vol. 39, no. 6 (94), pp. 745–752, 2006, [Online]. Available: https://sid.ir/paper/14058/en

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