STUDY OF THE SIZE-DEPENDANT VIBRATION BEHAVIOR OF AN AFM MICRO-CANTILEVER WITH A SIDEWALL PROBE

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ABBASI M.; KARAMI MOHAMMADI A.

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Journal: JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING) Year:2013 | Volume:6 | Issue:1 (13) Page(s): 11-21

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Title

STUDY OF THE SIZE-DEPENDANT VIBRATION BEHAVIOR OF AN AFM MICRO-CANTILEVER WITH A SIDEWALL PROBE

Author(s)

ABBASI M. | KARAMI MOHAMMADI A. | Issue Writer Certificate

Keywords

ATOMIC FORCE MICROSCOPEQ2

ASSEMBLED CANTILEVER PROBEQ2

MODIFIED COUPLE STRESS THEORYQ2

SIZE-DEPENDANT BEHAVIORQ2

SENSITIVITYQ2

Abstract

In this paper, the resonant frequency and SENSITIVITY of an ATOMIC FORCE MICROSCOPE (AFM) with an ASSEMBLED CANTILEVER PROBE (ACP) are analyzed utilizing the MODIFIED COUPLE STRESS THEORY. The proposed ACP comprises a horizontal micro-cantilever, an extension and a tip located at the free end of the extension, which makes AFM capable of scanning the sample sidewall. First, the governing differential equations and boundary conditions for dynamic analysis are obtained by a combination of the basic equations of the MODIFIED COUPLE STRESS THEORY and Hamilton principle. Then, a closed form expression for the resonant frequency is derived, and using this expression the sensitivities are also investigated. The results of the proposed model are compared with those of the classic beam theory. Comparison showed that the difference between the results predicted by these two theories were significant when the horizontal cantilever thickness comes approximately close to the material length scale parameter, in which for some values of contact stiffness the difference reaches its maximum. It can also be inferred that a decrease in the micro-cantilever thickness could have a knock on the effect of the shifts of first frequency and first SENSITIVITY caused by an increase in the extension length.

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APA: Copy

ABBASI, M., & KARAMI MOHAMMADI, A.. (2013). STUDY OF THE SIZE-DEPENDANT VIBRATION BEHAVIOR OF AN AFM MICRO-CANTILEVER WITH A SIDEWALL PROBE. JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING), 6(1 (13)), 11-21. SID. https://sid.ir/paper/171447/en

Vancouver: Copy

ABBASI M., KARAMI MOHAMMADI A.. STUDY OF THE SIZE-DEPENDANT VIBRATION BEHAVIOR OF AN AFM MICRO-CANTILEVER WITH A SIDEWALL PROBE. JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING)[Internet]. 2013;6(1 (13)):11-21. Available from: https://sid.ir/paper/171447/en

IEEE: Copy

M. ABBASI, and A. KARAMI MOHAMMADI, “STUDY OF THE SIZE-DEPENDANT VIBRATION BEHAVIOR OF AN AFM MICRO-CANTILEVER WITH A SIDEWALL PROBE,” JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING), vol. 6, no. 1 (13), pp. 11–21, 2013, [Online]. Available: https://sid.ir/paper/171447/en

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