EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND PHYSICAL PROPERTIES OF CARBON THIN FILMS PREPARED BY ION BEAM SPUTTERING DEPOSITION METHOD

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MOHAGHEGH POUR ELHAM; RAJABI MARJAN; GHOLAMI POUR REZA

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Journal: Journal of Advanced Processes in Materials Engineering Year:2018 | Volume:11 | Issue:4 (43) Page(s): 1-10

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Title

EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND PHYSICAL PROPERTIES OF CARBON THIN FILMS PREPARED BY ION BEAM SPUTTERING DEPOSITION METHOD

Author(s)

MOHAGHEGH POUR ELHAM | RAJABI MARJAN | GHOLAMI POUR REZA | Issue Writer Certificate

Keywords

THIN FILMQ2

AMORPHOUS CARBONQ2

SUBSTRATE TEMPERATUREQ2

ION BEAM SPUTTERING DEPOSITIONQ2

Abstract

In this study the effect of SUBSTRATE TEMPERATURE (from room temperature (RT) to 400° C) on the sructural and physical properties of cabon THIN FILMs were investigated. The films were prepared by ION BEAM SPUTTERING DEPOSITION technique on glass substrate. Optical and structural properties were studied by UV-visible spectroscopy, Raman spectroscopy and atomic force microscopy, respectively. The results showed that optical transparency decreased with the increase in the SUBSTRATE TEMPERATURE. Raman spectra indicated a structural transition from amorphous to graphite-like phase by increasing temperatures since in the spectra; D peak disappeared in the layer at the SUBSTRATE TEMPERATURE of 400° C. The result of sheet resistance and the optical band gap showed the reduction trend by the increase in the SUBSTRATE TEMPERATURE from 100 to 400° C. However the enhancement of the surface roughness with the SUBSTRATE TEMPERATURE was observed. In the layer prepered with the SUBSTRATE TEMPERATURE equal to 100 ° C, a minimum size of the graphite crystallites (with sp2 bands (La)) was equal to 0. 36 nm and a maximum optical band gap was equal to 3 eV.

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APA: Copy

MOHAGHEGH POUR, ELHAM, RAJABI, MARJAN, GHOLAMI POUR, REZA, MOJTAHEDZADEH LARIJANI, MAJID, & SHEYBANI, SHAHAB. (2018). EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND PHYSICAL PROPERTIES OF CARBON THIN FILMS PREPARED BY ION BEAM SPUTTERING DEPOSITION METHOD. ADVANCED PROCESSES IN MATERIALS, 11(4 (43) ), 1-10. SID. https://sid.ir/paper/172515/en

Vancouver: Copy

MOHAGHEGH POUR ELHAM, RAJABI MARJAN, GHOLAMI POUR REZA, MOJTAHEDZADEH LARIJANI MAJID, SHEYBANI SHAHAB. EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND PHYSICAL PROPERTIES OF CARBON THIN FILMS PREPARED BY ION BEAM SPUTTERING DEPOSITION METHOD. ADVANCED PROCESSES IN MATERIALS[Internet]. 2018;11(4 (43) ):1-10. Available from: https://sid.ir/paper/172515/en

IEEE: Copy

ELHAM MOHAGHEGH POUR, MARJAN RAJABI, REZA GHOLAMI POUR, MAJID MOJTAHEDZADEH LARIJANI, and SHAHAB SHEYBANI, “ EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND PHYSICAL PROPERTIES OF CARBON THIN FILMS PREPARED BY ION BEAM SPUTTERING DEPOSITION METHOD,” ADVANCED PROCESSES IN MATERIALS, vol. 11, no. 4 (43) , pp. 1–10, 2018, [Online]. Available: https://sid.ir/paper/172515/en

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