Fracture toughness and plasticity evaluation of sputter deposited tantalum nitride thin film

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Firouzabadi Seyed Siavash; DEHGHANI KAMRAN; NADERI MALEK; MAHBOUBI FARZAD

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Journal: Journal of Advanced Processes in Materials Engineering Year:2019 | Volume:13 | Issue:1 (48) Page(s): 103-113

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Title

Fracture toughness and plasticity evaluation of sputter deposited tantalum nitride thin film

Author(s)

Firouzabadi Seyed Siavash | DEHGHANI KAMRAN | NADERI MALEK | MAHBOUBI FARZAD | Issue Writer Certificate

Keywords

Tantalum Nitride Thin FilmsQ1

Magnetron SputteringQ1

Fracture ToughnessQ2

PlasticityQ1

Strain Rate SensitivityQ1

NanoindentationQ1

Abstract

Although tantalum nitride coatings have recently been attracted researchers’ attentions due to their high hardness and corrosion resistance, the Fracture Toughness and deformation Plasticity of thin tantalum nitride film has not been well investigated yet. In this research, for the first time, the Fracture Toughness, Strain Rate Sensitivity and Plasticity of sputter deposited Tantalum Nitride Thin Films have been evaluated using nano indentation technique and SEM micrographs. It was shown that the Fracture Toughness was increases from 0. 6 to 7. 8 MPa√ m with increasing the nitrogen in sputtering chamber. This increase was attributed to the structural evolution from a hexagonal γ-Ta2N phase to the hexagonal ε-TaN and face centered cubic δ-TaN phases, determined by X-Ray Diffraction analysis. The Plasticity of the TaN films evaluations indicated that the ratio of plastic work to total work was increased from 50% to 57% and 80%with phase variation from γ-Ta2N to ε-TaN and δ-TaN, respectively.

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APA: Copy

Firouzabadi, Seyed Siavash, DEHGHANI, KAMRAN, NADERI, MALEK, & MAHBOUBI, FARZAD. (2019). Fracture toughness and plasticity evaluation of sputter deposited tantalum nitride thin film. ADVANCED PROCESSES IN MATERIALS, 13(1 (48) ), 103-113. SID. https://sid.ir/paper/172667/en

Vancouver: Copy

Firouzabadi Seyed Siavash, DEHGHANI KAMRAN, NADERI MALEK, MAHBOUBI FARZAD. Fracture toughness and plasticity evaluation of sputter deposited tantalum nitride thin film. ADVANCED PROCESSES IN MATERIALS[Internet]. 2019;13(1 (48) ):103-113. Available from: https://sid.ir/paper/172667/en

IEEE: Copy

Seyed Siavash Firouzabadi, KAMRAN DEHGHANI, MALEK NADERI, and FARZAD MAHBOUBI, “Fracture toughness and plasticity evaluation of sputter deposited tantalum nitride thin film,” ADVANCED PROCESSES IN MATERIALS, vol. 13, no. 1 (48) , pp. 103–113, 2019, [Online]. Available: https://sid.ir/paper/172667/en

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