STUDY ON THE SIZE DEPENDENT BEHAVIOR OF A MICRO-BEAM SUBJECTED TO A NONLINEAR ELECTROSTATIC PRESSURE

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SADEGHI MORTEZA; FATHALILOU MOHAMMAD; REZAZADEH GHADER

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Journal: Modares Mechanical Engineering Year:2015 | Volume:14 | Issue:15 Page(s): 137-144

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Title

STUDY ON THE SIZE DEPENDENT BEHAVIOR OF A MICRO-BEAM SUBJECTED TO A NONLINEAR ELECTROSTATIC PRESSURE

Author(s)

SADEGHI MORTEZA | FATHALILOU MOHAMMAD | REZAZADEH GHADER | Issue Writer Certificate

Keywords

MICROBEAMQ1

ELECTROSTATICQ2

COUPLE STRESSQ2

PULL-INQ2

LENGTH SCALE PARAMETERQ2

Abstract

Size dependent behavior of materials appears for a structure when the characteristic size such as thickness or diameter is close to its internal length-scale parameter. In these cases, ignoring this behavior in modeling may lead to incorrect results. In this paper, strong effects of the size dependence on the static and dynamic behavior of the ELECTROSTATICally actuated micro-beams have been studied. The equilibrium positions or fixed points of the gold and nickel micro-beams have been determined and it is shown that for a given DC voltage, there is a considerable difference between the fixed points gained using the classic beam theory and the modified COUPLE STRESS theory. In addition, it is also seen that the static and dynamic PULL-IN voltages gained using the COUPLE STRESS theory are several times higher than those gained using the classic beam theory. Some previous studies have applied the classic beam theory in their models and introduced a considerable hypothetical value of residual stress to match their experimental and incorrect theoretical results. Using the modified COUPLE STRESS theory considerably decreases the difference with the experimental results.

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APA: Copy

SADEGHI, MORTEZA, FATHALILOU, MOHAMMAD, & REZAZADEH, GHADER. (2015). STUDY ON THE SIZE DEPENDENT BEHAVIOR OF A MICRO-BEAM SUBJECTED TO A NONLINEAR ELECTROSTATIC PRESSURE. MODARES MECHANICAL ENGINEERING, 14(15), 137-144. SID. https://sid.ir/paper/177725/en

Vancouver: Copy

SADEGHI MORTEZA, FATHALILOU MOHAMMAD, REZAZADEH GHADER. STUDY ON THE SIZE DEPENDENT BEHAVIOR OF A MICRO-BEAM SUBJECTED TO A NONLINEAR ELECTROSTATIC PRESSURE. MODARES MECHANICAL ENGINEERING[Internet]. 2015;14(15):137-144. Available from: https://sid.ir/paper/177725/en

IEEE: Copy

MORTEZA SADEGHI, MOHAMMAD FATHALILOU, and GHADER REZAZADEH, “STUDY ON THE SIZE DEPENDENT BEHAVIOR OF A MICRO-BEAM SUBJECTED TO A NONLINEAR ELECTROSTATIC PRESSURE,” MODARES MECHANICAL ENGINEERING, vol. 14, no. 15, pp. 137–144, 2015, [Online]. Available: https://sid.ir/paper/177725/en

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