GEOMETRICAL PARAMETERS MEASUREMENT OF SURFACE FUNCTIONALIZED MICROMACHINED MICRO-CANTILEVER USING OPTICAL METHOD

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KURHEKAR ANIL SUDHAKAR; APTE PRAKASH R.

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Journal Paper

Paper Information

Journal: INTERNATIONAL NANO LETTERS (INL) Year:2012 | Volume:2 | Issue:2 Page(s): 1-7

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Information Journal Paper

Title

GEOMETRICAL PARAMETERS MEASUREMENT OF SURFACE FUNCTIONALIZED MICROMACHINED MICRO-CANTILEVER USING OPTICAL METHOD

Author(s)

KURHEKAR ANIL SUDHAKAR | APTE PRAKASH R. | Issue Writer Certificate

Keywords

IMAGE MEASUREMENT

SILICON (100)

MICRO-CANTILEVERS

SCANNING WHITE LIGHT INTERFEROMETRY

Abstract

Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon<1 0 0> substrate. These sputtered gold-coated MICRO-CANTILEVERS were later surface-functionalized. Scanning electron microscopy (SEM), atomic force microscopy (AFM), and optical diffraction with laser source are employed to characterize the morphology and IMAGE MEASUREMENT of the micro-cantilever arrays, respectively. The spatial resolution produced in the proposed IMAGE MEASUREMENT method is approaching 1mm, and the repeatable precision is confirmable in nanometers. Compared with conventional AFM and SEM measurement techniques, the proposed method has demonstrated sufficient flexibility, repeatability, and reliability. The experimental results have been analyzed and presented in this paper for MEMS MICRO-CANTILEVERS. The SCANNING WHITE LIGHT INTERFEROMETRY based, two-point high-resolution optical method is presented for characterizing MICRO-CANTILEVERS and other MEMS microstructures. In this piece of work, we investigate the microstructure fabrication and IMAGE MEASUREMENT of geometrical parameters such as length, width, and step height of MICRO-CANTILEVERS fabricated using bulk micromachining technique onto silicon<100>substrate.

Cites

SPECTROSCOPIC-ELLIPSOMETRIC STUDY OF NATIVE OXIDE REMOVAL BY LIQUID PHASE HF PROCESS

References

DERIVATION OF SCHERRER RELATION USING AN APPROACH IN BASIC PHYSICS COURSE

Cite

APA: Copy

KURHEKAR, ANIL SUDHAKAR, & APTE, PRAKASH R.. (2012). GEOMETRICAL PARAMETERS MEASUREMENT OF SURFACE FUNCTIONALIZED MICROMACHINED MICRO-CANTILEVER USING OPTICAL METHOD. INTERNATIONAL NANO LETTERS (INL), 2(2), 1-7. SID. https://sid.ir/paper/321401/en

Vancouver: Copy

KURHEKAR ANIL SUDHAKAR, APTE PRAKASH R.. GEOMETRICAL PARAMETERS MEASUREMENT OF SURFACE FUNCTIONALIZED MICROMACHINED MICRO-CANTILEVER USING OPTICAL METHOD. INTERNATIONAL NANO LETTERS (INL)[Internet]. 2012;2(2):1-7. Available from: https://sid.ir/paper/321401/en

IEEE: Copy

ANIL SUDHAKAR KURHEKAR, and PRAKASH R. APTE, “GEOMETRICAL PARAMETERS MEASUREMENT OF SURFACE FUNCTIONALIZED MICROMACHINED MICRO-CANTILEVER USING OPTICAL METHOD,” INTERNATIONAL NANO LETTERS (INL), vol. 2, no. 2, pp. 1–7, 2012, [Online]. Available: https://sid.ir/paper/321401/en

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