STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE

Q: How can I download an article?

To download an article from SID, first log in to the site, search for the article title, and click on the 'Download Article' option.

Q: How can I download an ISI article?

To download an ISI article on SID, enter the keyword or article title in the search bar, view the relevant results, click on the desired article, and select the 'Download Article' option.

Q: How can I access the SID database?

To access the SID database, visit SID.ir, create an account, and log in to access scientific resources.

Q: Is downloading articles from SID free?

Some articles on SID are available for free, while others require payment. Details are specified on the article's page.

SADEGH HASSANI S.; SOBAT Z.

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

Journal Paper

Paper Information

Journal: International Journal of Nano Dimension Year:2011 | Volume:1 | Issue:3 Page(s): 159-175

Download Full-Text

View:

514

Download:

127

Cites:

Information Journal Paper

Title

STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE

Author(s)

SADEGH HASSANI S. | SOBAT Z. | Issue Writer Certificate

Keywords

NANO-LITHOGRAPHY

ATOMIC FORCE MICROSCOPY

SCANNING PROBE LITHOGRAPHY

NANOSTRUCTURE

SURFACE NANO-MODIFICATION

Abstract

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithographical methods mostly based on making nano-structures is presented.

Cites

AN OVERVIEW OF SCANNING NEAR-FIELD OPTICAL MICROSCOPY IN CHARACTERIZATION OF NANO-MATERIALS

References

Cite

APA: Copy

SADEGH HASSANI, S., & SOBAT, Z.. (2011). STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE. INTERNATIONAL JOURNAL OF NANO DIMENSION (IJND), 1(3), 159-175. SID. https://sid.ir/paper/322037/en

Vancouver: Copy

SADEGH HASSANI S., SOBAT Z.. STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE. INTERNATIONAL JOURNAL OF NANO DIMENSION (IJND)[Internet]. 2011;1(3):159-175. Available from: https://sid.ir/paper/322037/en

IEEE: Copy

S. SADEGH HASSANI, and Z. SOBAT, “STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE,” INTERNATIONAL JOURNAL OF NANO DIMENSION (IJND), vol. 1, no. 3, pp. 159–175, 2011, [Online]. Available: https://sid.ir/paper/322037/en

Related Journal Papers

No record.

Related Seminar Papers

No record.

Related Plans

No record.

Recommended Workshops