Investigation of the Effect of Electrostatic Actuation on the Electromechanical Behavior of Capacitive Pressure Microsensors

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RAHAEIFARD M.

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

Journal Paper

Paper Information

Journal: JOURNAL OF SOLID AND FLUID MECHANICS Year:2019 | Volume:9 | Issue:2 Page(s): 141-152

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Information Journal Paper

Title

Investigation of the Effect of Electrostatic Actuation on the Electromechanical Behavior of Capacitive Pressure Microsensors

Author(s)

RAHAEIFARD M. | Issue Writer Certificate

Keywords

Pressure SensorQ2

MicroplateQ1

Galerkin ApproachQ2

CapacitanceQ1

Abstract

In this study, electromechanical behavior of the micro scaled capacitive Pressure Sensors is investigated and the effect of electrostatic actuation on the performance of the device is analyzed. The sensor is considered as a circular Microplate with an initial distance from a fixed substrate. Due to electrostatic load and external pressure, the plate deflects and the Capacitance of the device changes. The external pressure can be estimated by measuring this change of Capacitance. Hence, in this research, the relation between the Capacitance and external pressure is studied. To this goal, the equation governing static deflection of the Microplate is derived in polar coordinates. This equation is converted to an algebraic equation using Galerkin Approach and then solved utilizing an iterative method. Finally, the effects of external pressure and applied voltage on the Capacitance and sensitivity of the device are investigated and the convergence of the proposed iterative algorithm is analyzed.

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APA: Copy

RAHAEIFARD, M.. (2019). Investigation of the Effect of Electrostatic Actuation on the Electromechanical Behavior of Capacitive Pressure Microsensors. JOURNAL OF SOLID AND FLUID MECHANICS, 9(2 ), 141-152. SID. https://sid.ir/paper/367793/en

Vancouver: Copy

RAHAEIFARD M.. Investigation of the Effect of Electrostatic Actuation on the Electromechanical Behavior of Capacitive Pressure Microsensors. JOURNAL OF SOLID AND FLUID MECHANICS[Internet]. 2019;9(2 ):141-152. Available from: https://sid.ir/paper/367793/en

IEEE: Copy

M. RAHAEIFARD, “Investigation of the Effect of Electrostatic Actuation on the Electromechanical Behavior of Capacitive Pressure Microsensors,” JOURNAL OF SOLID AND FLUID MECHANICS, vol. 9, no. 2 , pp. 141–152, 2019, [Online]. Available: https://sid.ir/paper/367793/en

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