COMPREHENSIVE ELECTROMECHANICAL ANALYSIS OF MEMS VARIABLE GAP CAPACITORS

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NABOVATI H.; MAFINEZHAD KH.; NABOVATI A.; KESHMIRI H.

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Journal Paper

Paper Information

Journal: JOURNAL OF IRANIAN ASSOCIATION OF ELECTRICAL AND ELECTRONICS ENGINEERS Year:2008 | Volume:4 | Issue:2 Page(s): 3-9

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Title

COMPREHENSIVE ELECTROMECHANICAL ANALYSIS OF MEMS VARIABLE GAP CAPACITORS

Author(s)

NABOVATI H. | MAFINEZHAD KH. | NABOVATI A. | KESHMIRI H. | Issue Writer Certificate

Keywords

MEMS

VARIABLE CAPACITORS

ELECTROMECHANICAL MODELING

Abstract

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS1 VARIABLE CAPACITORS. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of the MEMS, and an ac small signal equivalent circuit are presented. The mathematical models are defined and examined by the Mat lab Simulink and a complete set of simulation results is reported for various cases separately. The results of this study would be useful in design and analysis of the MEMS based circuits which have some kind of mechanical dynamic action. Some examples of such devices may include VCO2s, frequency modulators, tunable filters and parametric effect circuits.

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APA: Copy

NABOVATI, H., MAFINEZHAD, KH., NABOVATI, A., & KESHMIRI, H.. (2008). COMPREHENSIVE ELECTROMECHANICAL ANALYSIS OF MEMS VARIABLE GAP CAPACITORS. JOURNAL OF IRANIAN ASSOCIATION OF ELECTRICAL AND ELECTRONICS ENGINEERS, 4(2), 3-9. SID. https://sid.ir/paper/569247/en

Vancouver: Copy

NABOVATI H., MAFINEZHAD KH., NABOVATI A., KESHMIRI H.. COMPREHENSIVE ELECTROMECHANICAL ANALYSIS OF MEMS VARIABLE GAP CAPACITORS. JOURNAL OF IRANIAN ASSOCIATION OF ELECTRICAL AND ELECTRONICS ENGINEERS[Internet]. 2008;4(2):3-9. Available from: https://sid.ir/paper/569247/en

IEEE: Copy

H. NABOVATI, KH. MAFINEZHAD, A. NABOVATI, and H. KESHMIRI, “COMPREHENSIVE ELECTROMECHANICAL ANALYSIS OF MEMS VARIABLE GAP CAPACITORS,” JOURNAL OF IRANIAN ASSOCIATION OF ELECTRICAL AND ELECTRONICS ENGINEERS, vol. 4, no. 2, pp. 3–9, 2008, [Online]. Available: https://sid.ir/paper/569247/en

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