A STUDY OF ZNO BUFFER LAYER EFFECT ON PHYSICAL PROPERTIES OF ITO THIN FILMS DEPOSITED ON DIFFERENT SUBSTRATES

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MANAVIZADEH NEGIN; KHODAYARI ALI REZA; ASL SOLEIMANI EBRAHIM; BAGHERZADEH SHEYDA

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Journal Paper

Paper Information

Journal: Iranian Journal of Chemistry and Chemical Engineering Year:2012 | Volume:31 | Issue:1 (61) Page(s): 31-36

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Title

A STUDY OF ZNO BUFFER LAYER EFFECT ON PHYSICAL PROPERTIES OF ITO THIN FILMS DEPOSITED ON DIFFERENT SUBSTRATES

Author(s)

MANAVIZADEH NEGIN | KHODAYARI ALI REZA | ASL SOLEIMANI EBRAHIM | BAGHERZADEH SHEYDA | Issue Writer Certificate

Keywords

RF SPUTTERING

INDIUM TIN OXIDE

ZINC OXIDE

TRANSPARENT CONDUCTIVE OXIDE FILMS

BUFFER LAYER

Abstract

The improvement of the physical properties of INDIUM TIN OXIDE (ITO) layers is quite advantageous in photovoltaic applications. In this study the ITO film is deposited by RF SPUTTERING onto p-type crystalline silicon (c-Si) with (100) orientation, multicrystalline silicon (mc-Si), and glass substrates coated with ZnO and annealed in vacuum furnace at 400°C. Electrical, optical, structural and morphological properties of the ITO films were analyzed by four point probe, UV/VIS/IR spectrophotometer, X-Ray Diffraction (XRD) and Scanning Electron Microscope (SEM). The quality of films deposited on BUFFER LAYER is found to be superior to those grown directly on a substrate. The structural, optical and electrical studies reveal that ZnO BUFFER LAYERs improve the crystalline quality, optical and electrical properties of ITO thin films.

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APA: Copy

MANAVIZADEH, NEGIN, KHODAYARI, ALI REZA, ASL SOLEIMANI, EBRAHIM, & BAGHERZADEH, SHEYDA. (2012). A STUDY OF ZNO BUFFER LAYER EFFECT ON PHYSICAL PROPERTIES OF ITO THIN FILMS DEPOSITED ON DIFFERENT SUBSTRATES. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), 31(1 (61)), 31-36. SID. https://sid.ir/paper/571278/en

Vancouver: Copy

MANAVIZADEH NEGIN, KHODAYARI ALI REZA, ASL SOLEIMANI EBRAHIM, BAGHERZADEH SHEYDA. A STUDY OF ZNO BUFFER LAYER EFFECT ON PHYSICAL PROPERTIES OF ITO THIN FILMS DEPOSITED ON DIFFERENT SUBSTRATES. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE)[Internet]. 2012;31(1 (61)):31-36. Available from: https://sid.ir/paper/571278/en

IEEE: Copy

NEGIN MANAVIZADEH, ALI REZA KHODAYARI, EBRAHIM ASL SOLEIMANI, and SHEYDA BAGHERZADEH, “A STUDY OF ZNO BUFFER LAYER EFFECT ON PHYSICAL PROPERTIES OF ITO THIN FILMS DEPOSITED ON DIFFERENT SUBSTRATES,” IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), vol. 31, no. 1 (61), pp. 31–36, 2012, [Online]. Available: https://sid.ir/paper/571278/en

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