Information Journal Paper
APA:
CopyDUWEL, A., CANDLER, R.N., & KENNY, T.W.. (2006). ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 15(6), 1437-1445. SID. https://sid.ir/paper/602233/en
Vancouver:
CopyDUWEL A., CANDLER R.N., KENNY T.W.. ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[Internet]. 2006;15(6):1437-1445. Available from: https://sid.ir/paper/602233/en
IEEE:
CopyA. DUWEL, R.N. CANDLER, and T.W. KENNY, “ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 15, no. 6, pp. 1437–1445, 2006, [Online]. Available: https://sid.ir/paper/602233/en