Information Journal Paper
APA:
CopyDEKOVEN, B., WARD, P.R., & WEISS, R.E.. (2003). CARBON THIN FILM DEPOSITION USING HIGH POWER PULSED MAGNETRON SPUTTERING. ANNUAL TECHNICAL CONFERENCE PROCEEDING SOCIETY OF VACUUM COATERS, -(46), 158-165. SID. https://sid.ir/paper/607562/en
Vancouver:
CopyDEKOVEN B., WARD P.R., WEISS R.E.. CARBON THIN FILM DEPOSITION USING HIGH POWER PULSED MAGNETRON SPUTTERING. ANNUAL TECHNICAL CONFERENCE PROCEEDING SOCIETY OF VACUUM COATERS[Internet]. 2003;-(46):158-165. Available from: https://sid.ir/paper/607562/en
IEEE:
CopyB. DEKOVEN, P.R. WARD, and R.E. WEISS, “CARBON THIN FILM DEPOSITION USING HIGH POWER PULSED MAGNETRON SPUTTERING,” ANNUAL TECHNICAL CONFERENCE PROCEEDING SOCIETY OF VACUUM COATERS, vol. -, no. 46, pp. 158–165, 2003, [Online]. Available: https://sid.ir/paper/607562/en