Information Journal Paper
APA:
CopyLI, X., BHUSHAN, B., & TAKASHIMA, K.. (2003). MECHANICAL CHARACTERIZATION OF MICRO/NANOSCALE STRUCTURES FOR MEMS/NEMS APPLICATIONS USING NANO INDENTATION TECHNIQUES. ULTRAMICROSCOPY, 97(-), 481-494. SID. https://sid.ir/paper/630686/en
Vancouver:
CopyLI X., BHUSHAN B., TAKASHIMA K.. MECHANICAL CHARACTERIZATION OF MICRO/NANOSCALE STRUCTURES FOR MEMS/NEMS APPLICATIONS USING NANO INDENTATION TECHNIQUES. ULTRAMICROSCOPY[Internet]. 2003;97(-):481-494. Available from: https://sid.ir/paper/630686/en
IEEE:
CopyX. LI, B. BHUSHAN, and K. TAKASHIMA, “MECHANICAL CHARACTERIZATION OF MICRO/NANOSCALE STRUCTURES FOR MEMS/NEMS APPLICATIONS USING NANO INDENTATION TECHNIQUES,” ULTRAMICROSCOPY, vol. 97, no. -, pp. 481–494, 2003, [Online]. Available: https://sid.ir/paper/630686/en