Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation

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Tahmasebipour Mohammad; Tahmasebipour Younes; Vafaie Ali

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Journal Paper

Paper Information

Journal: INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY Year:2019 | Volume:12 | Issue:2 Page(s): 103-109

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Information Journal Paper

Title

Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation

Author(s)

Tahmasebipour Mohammad | Tahmasebipour Younes | Vafaie Ali | Issue Writer Certificate

Keywords

MEMS

Microbeam

Microcantilever

Micromachining

Micro Wire Electrical Discharge Machining

Micro-WEDM

Abstract

Metal-based microelectromechanical systems are widely used in applications such as micro-energy harvesters, micro-heat exchangers and micro-electromagnetic that require high strength and flexibility. In the fabrication of such systems, Micro Wire Electrical Discharge Machining (MicroWEDM) is majorly used. This paper studies the effect of the MicroWEDM process parameters on the dimensional deviation of machined MEMS structures including Microcantilevers and micro-beams using the Taguchi method. Using optimal levels of the parameters including pulse duration (0. 8 μ s), cutting speed (8. 4 mm/min), voltage (17 V) and wire tension (0. 5 kg), the dimensional deviation is reduced about 8. 65 times compared with the average of experiments results. The order of effect importance of the process parameters on the dimensional deviation of microstructures obtained by the ANOVA analysis of S/N ratios is as follows: pulse duration, wire tension, process voltage and cutting speed. Dimensional deviation of the micro-features was reduced to 1 μ m using the optimal levels of the process parameters.

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APA: Copy

Tahmasebipour, Mohammad, Tahmasebipour, Younes, & Vafaie, Ali. (2019). Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation. INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY, 12(2), 103-109. SID. https://sid.ir/paper/721636/en

Vancouver: Copy

Tahmasebipour Mohammad, Tahmasebipour Younes, Vafaie Ali. Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation. INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY[Internet]. 2019;12(2):103-109. Available from: https://sid.ir/paper/721636/en

IEEE: Copy

Mohammad Tahmasebipour, Younes Tahmasebipour, and Ali Vafaie, “Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation,” INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY, vol. 12, no. 2, pp. 103–109, 2019, [Online]. Available: https://sid.ir/paper/721636/en

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