INVESTIGATION OF SPUTTERING EFFICIENCY OF INCIDENT ARGON IONS TO CARBON LAYER AT DIFFERENT BEAM ANGLES

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KAZEMINEZHAD MINA; GHALAMBOR DEZFOOLI ABDOL MOHAMMAD; KAZEMINEZHAD IRAJ

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Seminar Paper

Paper Information

Seminar: NATIONAL VACUUM CONFERENCE IRAN
Year:2012 | Issue:5

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Title

INVESTIGATION OF SPUTTERING EFFICIENCY OF INCIDENT ARGON IONS TO CARBON LAYER AT DIFFERENT BEAM ANGLES

Author(s)

KAZEMINEZHAD MINA | GHALAMBOR DEZFOOLI ABDOL MOHAMMAD | KAZEMINEZHAD IRAJ

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Abstract

IN THIS RESEARCH, A CARBON TARGET HAS BEEN INCIDENT BY ARGON ION BEAMS UNDER VARIOUS ANGLES. SURFACE SPUTTERING EFFICIENCY, DISTRIBUTION, AND PENETRATION DEPTH OF ARGON BEAM HAVE BEEN DETERMINED AND STUDIED. SRIM-TRIM 2008 SOFTWARE HAS BEEN USED FOR CALCULATING THE DISTRIBUTION PARAMETERS AND MODELING OF THE IONS PENETRATION. THE RESULTS SHOW THAT BY INCREASING THE ANGLE OF INCIDENT BEAM, THE PENETRATION DEPTH DECREASES AND ARGON IONS HAVE THE SURFACE DISTRIBUTION. IN ADDITION, THE RESULTS SHOW THAT THE SPUTTERING EFFICIENCY INCREASES WHEN THE INCIDENT ANGLE INCREASES.

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