DESIGN AND CONSTRUCTION OF HOT CATHODE PLASMA SOURCE

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SALAHSHOOR MOSTAFA; ZAVARIAN ALI ASGHAR; SALEHI MARYAM

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Seminar Paper

Paper Information

Seminar: NATIONAL VACUUM CONFERENCE IRAN
Year:2012 | Issue:5

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Title

DESIGN AND CONSTRUCTION OF HOT CATHODE PLASMA SOURCE

Author(s)

SALAHSHOOR MOSTAFA | ZAVARIAN ALI ASGHAR | SALEHI MARYAM

Keywords

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Abstract

IN THIS RESEARCH, A HOT CATHODE PLASMA SOURCE WAS MADE AND THE PLASMA FORMATION IN HIGH VACUUM REGIME (RANGE OF 10-3 TO 10-4 MBAR) WAS STUDIED BY APPLYING MAGNETIC FIELD BY MEANS OF PERMANENT MAGNETS ASSEMBLY. EFFECTS OF VARIOUS CONTROL PARAMETERS SUCH AS WORKING PRESSURE, DISCHARGE VOLTAGE AND EXTERNAL ELECTRON SOURCE (HOT TUNGSTEN FILAMENT) ON PLASMA DENSITY WERE INVESTIGATED. AT A DISCHARGE VOLTAGE OF 57 VOLT, MAGNETIC FIELD OF ABOUT 200 GAUSS, FILAMENT CURRENT OF 18 AMPERE, 130 MILIAMPERE FOR DISCHARGE CURRENT WAS OBTAINED AT A PRESSURE OF 1.2×10-4 MBAR.

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APA: Copy

SALAHSHOOR, MOSTAFA, ZAVARIAN, ALI ASGHAR, & SALEHI, MARYAM. (2012). DESIGN AND CONSTRUCTION OF HOT CATHODE PLASMA SOURCE. NATIONAL VACUUM CONFERENCE IRAN. SID. https://sid.ir/paper/906977/en

Vancouver: Copy

SALAHSHOOR MOSTAFA, ZAVARIAN ALI ASGHAR, SALEHI MARYAM. DESIGN AND CONSTRUCTION OF HOT CATHODE PLASMA SOURCE. 2012. Available from: https://sid.ir/paper/906977/en

IEEE: Copy

MOSTAFA SALAHSHOOR, ALI ASGHAR ZAVARIAN, and MARYAM SALEHI, “DESIGN AND CONSTRUCTION OF HOT CATHODE PLASMA SOURCE,” presented at the NATIONAL VACUUM CONFERENCE IRAN. 2012, [Online]. Available: https://sid.ir/paper/906977/en

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