Silica as the most ubiquitous material has been used profoundly in ceramic industry for many years. One of the recent sources for containing silica materials is colloidal silica nanoparticles which have been surprisingly used in electronic substrates, thin film, emulsifier, stabilizer, catalysis, binder, chemical and mechanical polishing. The quality of these products directly depends on the both size uniformity and distribution of silica nanoparticles. The size, size distribution and the yield of silica were controlled by the concentration of reactants, ammonia content as the famous basic catalyst, temperature, pH and mixing mode.In this study, the synthesis of nanometer silica particles via hydrolysis and condensation of tetraethylorthosilicate (TEOS) is described in different ammonia content and pH. Monodispersed spherical colloidal silica nanoparticles with uniform size and narrow size distribution were obtained by this technique. The increase in ammonia concentration resulted in bigger silica nanoparticles (from 100nm to 300nm) and higher yield of silica. In acidic pH range, only silica layers containing many cracks were obtained, however, nanosilica particles agglomerations were synthesized in basic range. The Fourier transform infrared spectroscopy (FTIR) shows the both asymmetric and symmetric stretch vibration of silioxan bridge (Si-O-Si) and silianol groups (Si-OH) on the silica nanoparticles surface.