In this research, the possibility of evaluating non-destructive materials using terahertz waves was investigated. For this purpose, the results of determining the specific defects dimensions on the samples of aluminum, plexiglas and ceramic zirconium dioxide with the results of dimensional measurements with methods such as Coordinate Measuring Machine (CMM), micro-X and Visual Measurement Machine (VMM) was compared. In order to conduct research, depending on the nature of the sample and the required information, two configurations (transmission and reflection) of the terahertz imaging system based on the terahertz time domain spectroscopy system were used in which the generation and detection of terahertz waves pulses were performed using a femto-second laser. The results showed that non-destructive terahertz test was used to identify defects (very shallow surface defects and hidden defects in sample tissue) and measurements were superior to some of the common methods. In the final, the terahertz wave imaging method is a non-destructive test that can compete with conventional methods.