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Information Journal Paper

Title

DYNAMIC MODELING AND NONLINEAR VIBRATION ANALYSIS OF PIEZOELECTRIC MICRO-BEAM IN SELF SENSING MODE OF AN ATOMIC FORCE MICROSCOPE

Pages

  531-542

Abstract

 Nowadays, atomic force microscopes are considered as useful tools in the determination of intermolecular forces and surface topography with the resolution of nanometers. In this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool. Piezoelectric micro cantilevers are the new generation of the cantilevers among the common micro cantilevers that are used in atomic force microscopes. Having the ability to self-stimulate and self-measure, they have greater popularity among other cantilevers.This paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triangular head, in self-measure mode and close proximity to the surface of a sample. Output CHARGE from the piezoelectric layer and also the output current, in this mode, are considered as effective factors in themeasurement of the bending. The micro cantilever’s vibration behavior becomes nonlinear, as it approaches the surface of the sample. Surely the piezoelectric layer in the self-measure mode can be considered as a good measuring tool, only when it reflects the effects of the nonlinear interaction between the tip of the probe and the surface of the sample in its measurements. In order to investigate this matter, first the differential equations that are ruling over the vibrating movements of the piezoelectric micro cantilever with a triangular head are transformed into normal nonlinear differential equations using the Galerkin method. Then the resulting nonlinear differential equation is solved using the multiple scale method. After solving the governing differential equation of the problem, the micro cantilevers behavior in the proximity of the surface of the sample is simulated and the effect of factors such as balancing distance, oscillation modes and the substance of piezoelectric layer are investigated.

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    APA: Copy

    GHADERI, REZA, & HAGHANI, AHMAD. (2016). DYNAMIC MODELING AND NONLINEAR VIBRATION ANALYSIS OF PIEZOELECTRIC MICRO-BEAM IN SELF SENSING MODE OF AN ATOMIC FORCE MICROSCOPE. JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING), 9(3 ), 531-542. SID. https://sid.ir/paper/171362/en

    Vancouver: Copy

    GHADERI REZA, HAGHANI AHMAD. DYNAMIC MODELING AND NONLINEAR VIBRATION ANALYSIS OF PIEZOELECTRIC MICRO-BEAM IN SELF SENSING MODE OF AN ATOMIC FORCE MICROSCOPE. JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING)[Internet]. 2016;9(3 ):531-542. Available from: https://sid.ir/paper/171362/en

    IEEE: Copy

    REZA GHADERI, and AHMAD HAGHANI, “DYNAMIC MODELING AND NONLINEAR VIBRATION ANALYSIS OF PIEZOELECTRIC MICRO-BEAM IN SELF SENSING MODE OF AN ATOMIC FORCE MICROSCOPE,” JOURNAL OF SIMULATION AND ANALYSIS OF NOVEL TECHNOLOGIES IN MECHANICAL ENGINEERING (JOURNAL OF SOLID MECHANICS IN ENGINEERING), vol. 9, no. 3 , pp. 531–542, 2016, [Online]. Available: https://sid.ir/paper/171362/en

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