Design of an Observer for an XY Nano-Positioner using Neural Network

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Bayat Saeid; heravi mohammad; NEJAT PISHKENARI HOSSEIN; Salarieh Hasan

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Journal: Modares Mechanical Engineering Year:2018 | Volume:18 | Issue:6 Page(s): 139-143

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Title

Design of an Observer for an XY Nano-Positioner using Neural Network

Author(s)

Bayat Saeid | heravi mohammad | NEJAT PISHKENARI HOSSEIN | Salarieh Hasan | Issue Writer Certificate

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Abstract

Nowadays, nano-precision positioning stages, have a special position and are used in a variety of applications, such as taking pictures and taking particles of the surface. In this paper, someNano-positioner| Observer| Neural Networks for a nano-precision positioning platform are designed based on three different types ofNano-positioner| Observer| Neural Networks. The simulated platform was designed at Sharif University of Technology and, based on the system's final requirement for the feedback signal for use in the control rule,Nano-positioner| Observer| Neural NetworkNano-positioner| Observer| Neural Networks were designed. In previous studies, the comsol model of the positioning system has been obtained. At this step, theNano-positioner| Observer| Neural Network has used the Comsol model and the system has been trained for a sum of a number of sinusoidal functions, and its generalizability has been investigated for ramp input.Nano-positioner| Observer| Neural Networks used include, respectively, a multi-layer perceptron network, a radial basis function network and a support vector regression network. By performing simulations, it has been seen that the multi-layer perceptron network and the radial basis function network yielded a good response with low error, but the support vector regression network has a relatively high error.

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APA: Copy

Bayat, Saeid, heravi, mohammad, NEJAT PISHKENARI, HOSSEIN, & Salarieh, Hasan. (2018). Design of an Observer for an XY Nano-Positioner using Neural Network. MODARES MECHANICAL ENGINEERING, 18(6 ), 139-143. SID. https://sid.ir/paper/178109/en

Vancouver: Copy

Bayat Saeid, heravi mohammad, NEJAT PISHKENARI HOSSEIN, Salarieh Hasan. Design of an Observer for an XY Nano-Positioner using Neural Network. MODARES MECHANICAL ENGINEERING[Internet]. 2018;18(6 ):139-143. Available from: https://sid.ir/paper/178109/en

IEEE: Copy

Saeid Bayat, mohammad heravi, HOSSEIN NEJAT PISHKENARI, and Hasan Salarieh, “Design of an Observer for an XY Nano-Positioner using Neural Network,” MODARES MECHANICAL ENGINEERING, vol. 18, no. 6 , pp. 139–143, 2018, [Online]. Available: https://sid.ir/paper/178109/en

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