Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory

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SAEEDI B.; VATANKHAH R.

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Journal: Modares Mechanical Engineering Year:2019 | Volume:19 | Issue:6 Page(s): 1457-1466

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Title

Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory

Author(s)

SAEEDI B. | VATANKHAH R. | Issue Writer Certificate

Keywords

Functionally Graded MaterialsQ1

Modified Couple Stress TheoryQ1

Length Scale ParameterQ1

Atomic Force MicroscopQ1

Abstract

In this article, the flexural sensitivity and flexural resonant frequency of the Atomic Force Microscope made of Functionally Graded Materials is investigated by Modified Couple Stress Theory (MCST). In MCST, the size effect of the system is taking into account by means of the material Length Scale Parameter. Microbeam is made of a mixture of metal and ceramic with properties varying through the thickness following a simple power law of n. In this work, due to the kinematic energy and potential energy of microbeam, the governing equations of motion and corresponding boundary conditions are derived on the basis of Hamilton principle by considering Euler-Bernoulli beam theory. Based on the results, it is clear that when the contact stiffness increases, the flexural sensitivity of the system decreases, and flexural resonant frequency increases. Moreover, when the microbeam thickness comes approximately close to material Length Scale Parameter, the difference between MCST and classical continuum mechanic becomes significant. Furthermore, in low contact stiffness, increasing the power n reduces the flexural sensitivity of microbeam, while in high contact stiffness, increasing the power n increases the flexural sensitivity of the system. Results also show that at each value of contact stiffness, as ceramic volume fraction increases the flexural resonant frequency will be increased, too.

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APA: Copy

SAEEDI, B., & VATANKHAH, R.. (2019). Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory. MODARES MECHANICAL ENGINEERING, 19(6 ), 1457-1466. SID. https://sid.ir/paper/178621/en

Vancouver: Copy

SAEEDI B., VATANKHAH R.. Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory. MODARES MECHANICAL ENGINEERING[Internet]. 2019;19(6 ):1457-1466. Available from: https://sid.ir/paper/178621/en

IEEE: Copy

B. SAEEDI, and R. VATANKHAH, “Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory,” MODARES MECHANICAL ENGINEERING, vol. 19, no. 6 , pp. 1457–1466, 2019, [Online]. Available: https://sid.ir/paper/178621/en

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