DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY

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BIJARI A.; KESHMIRI S. H.; WANBUREE W.; SRIPHUNG C.; PHATTHANAKUN R.

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Journal Paper

Paper Information

Journal: IRANIAN JOURNAL OF ELECTRICAL AND ELECTRONIC ENGINEERING Year:2012 | Volume:8 | Issue:4 Page(s): 280-289

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Title

DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY

Author(s)

Keywords

MICROMECHANICAL RING FILTER

NICKEL ELECTROPLATING

SU-8 PHOTORESIST

UVLIGA

Abstract

This paper presents a novel low-cost fabrication process for micromechanical filter in UV-LIGA technology. The micromechanical filter consists of the two identical bulk-mode ring resonators, mechanically coupled by a flexural-mode beam. The design procedure is performed by a mechanical lumped element model and ANSYS software. The low-cost fabrication process with only three UV-lithography steps is used to achieve a high aspect ratio of 20 with 3mm gap spacing. The fabricated filter is characterized using a fully differential drive and sense interface circuit. The experimental results demonstrates micromechanical filter with a center frequency of 10.31 MHz and percent bandwidth less than 0.3% using a DC-bias voltage of 60 V. The detailed fabrication process can be applied as an appropriate alternative to X-ray LIGA and silicon-based micromechanical filters.

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APA: Copy

BIJARI, A., KESHMIRI, S. H., WANBUREE, W., SRIPHUNG, C., & PHATTHANAKUN, R.. (2012). DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY. IRANIAN JOURNAL OF ELECTRICAL AND ELECTRONIC ENGINEERING, 8(4), 280-289. SID. https://sid.ir/paper/299876/en

Vancouver: Copy

BIJARI A., KESHMIRI S. H., WANBUREE W., SRIPHUNG C., PHATTHANAKUN R.. DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY. IRANIAN JOURNAL OF ELECTRICAL AND ELECTRONIC ENGINEERING[Internet]. 2012;8(4):280-289. Available from: https://sid.ir/paper/299876/en

IEEE: Copy

A. BIJARI, S. H. KESHMIRI, W. WANBUREE, C. SRIPHUNG, and R. PHATTHANAKUN, “DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY,” IRANIAN JOURNAL OF ELECTRICAL AND ELECTRONIC ENGINEERING, vol. 8, no. 4, pp. 280–289, 2012, [Online]. Available: https://sid.ir/paper/299876/en

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