STUDY ON THE PULL-IN INSTABILITY OF GOLD MICRO-SWITCHES USING VARIABLE LENGTH SCALE PARAMETER

Q: How can I download an article?

To download an article from SID, first log in to the site, search for the article title, and click on the 'Download Article' option.

Q: How can I download an ISI article?

To download an ISI article on SID, enter the keyword or article title in the search bar, view the relevant results, click on the desired article, and select the 'Download Article' option.

Q: How can I access the SID database?

To access the SID database, visit SID.ir, create an account, and log in to access scientific resources.

Q: Is downloading articles from SID free?

Some articles on SID are available for free, while others require payment. Details are specified on the article's page.

FATHALILOU M.; SADEGHI M.; REZAZADEH G.; JALILPOUR M.; NAGHILOU A.; AHOUIGHAZVIN S.

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

Journal Paper

Paper Information

Journal: JOURNAL OF SOLID MECHANICS Year:2011 | Volume:3 | Issue:2 Page(s): 114-123

Download Full-Text

View:

411

Download:

131

Cites:

Information Journal Paper

Title

STUDY ON THE PULL-IN INSTABILITY OF GOLD MICRO-SWITCHES USING VARIABLE LENGTH SCALE PARAMETER

Author(s)

Keywords

MEMS

GOLD MICRO-SWITCH

COUPLE STRESS THEORY

LENGTH-SCALE PARAMETER

PULL-IN VOLTAGE

Abstract

In this paper, the size dependent behavior of the GOLD MICRO-SWITCHes has been studied. This behavior becomes noticeable for a structure when the characteristic size such as thickness or diameter is close to its internal LENGTH-SCALE PARAMETER. The size dependent effect is insignificant for the high ratio of the characteristic size to the LENGTH-SCALE PARAMETER, which is the case of the silicon base micro-beams. On the other hand, in some types of micro-beams like gold base, the size dependent effect cannot be overlooked. In such cases, ignoring this behavior in modeling will lead to incorrect results. Some previous researchers have applied classic beam theory on their models and imposed a considerable hypothetical value of residual stress to match their theoretical results with the experimental ones. In this study, by obtaining the equilibrium positions or fixed points of the gold micro-beam, a considerable difference between the obtained fixed points using classic beam theory and modified COUPLE STRESS THEORY has been shown. In addition, it has been shown that the calculated PULL-IN VOLTAGEs using modified COUPLE STRESS THEORY are much closer to the experimental results than those obtained by classic beam theory. Finally, it has been shown that considering a unique value of length scale parameter, especially for the smallest values of the beam thicknesses, may leads to inaccurate results and variable length scale parameter should be considered.

Cites

No record.

References

Cite

APA: Copy

FATHALILOU, M., SADEGHI, M., REZAZADEH, G., JALILPOUR, M., NAGHILOU, A., & AHOUIGHAZVIN, S.. (2011). STUDY ON THE PULL-IN INSTABILITY OF GOLD MICRO-SWITCHES USING VARIABLE LENGTH SCALE PARAMETER. JOURNAL OF SOLID MECHANICS, 3(2), 114-123. SID. https://sid.ir/paper/319244/en

Vancouver: Copy

FATHALILOU M., SADEGHI M., REZAZADEH G., JALILPOUR M., NAGHILOU A., AHOUIGHAZVIN S.. STUDY ON THE PULL-IN INSTABILITY OF GOLD MICRO-SWITCHES USING VARIABLE LENGTH SCALE PARAMETER. JOURNAL OF SOLID MECHANICS[Internet]. 2011;3(2):114-123. Available from: https://sid.ir/paper/319244/en

IEEE: Copy

M. FATHALILOU, M. SADEGHI, G. REZAZADEH, M. JALILPOUR, A. NAGHILOU, and S. AHOUIGHAZVIN, “STUDY ON THE PULL-IN INSTABILITY OF GOLD MICRO-SWITCHES USING VARIABLE LENGTH SCALE PARAMETER,” JOURNAL OF SOLID MECHANICS, vol. 3, no. 2, pp. 114–123, 2011, [Online]. Available: https://sid.ir/paper/319244/en

Related Journal Papers

No record.

Related Seminar Papers

No record.

Related Plans

No record.

Recommended Workshops