Improvement of Surface Integrity of PDMS Micro-channel in the Micro Electrochemical Discharge Milling Process

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TORABI A.; RAZFAR M.R.

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Journal: Modares Mechanical Engineering Year:2020 | Volume:20 | Issue:11 Page(s): 2605-2615

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Title

Improvement of Surface Integrity of PDMS Micro-channel in the Micro Electrochemical Discharge Milling Process

Author(s)

TORABI A. | RAZFAR M.R. | Issue Writer Certificate

Keywords

Polydimethylsiloxane (PDMS)Q2

Electrochemical Discharge MillingQ1

Micro-ChannelQ1

Surface IntegrityQ1

Abstract

In recent years, forming a 3D microfluidic channels on the electrical non-conductive material such as Polydimethylsiloxane (PDMS) in the micro-electromechanical system (MEMS) and medical applications is of great interest. Lithography is the most know process to create patterns on the PDMS however there are a few drawbacks to this process such as high operational cost and time, and sidewall angle. In all applications, the quality of the Micro-Channel surface determines the performance of it. In this research as innovatively the Electrochemical Discharge Milling (ECDM) which is known for lower operational cost and proper material removal rate (MRR; i. e. process time), and is capable of creating patterns on electrical non-conductive material, was used to form a Micro-Channel on the PDMS. To that end, the effect of process parameters such as electrolyte concentration, feed rate and cutting speed and voltage on the surface roughness and Surface Integrity deeply investigated. It was observed that ECDM is capable of creating patterns on the PDMS with Surface Integrity which is comparable with the lithography Micro-Channel. It is also observed that decreasing the rotational speed from 10000 to 0rpm results in increasing the surface roughness 2 to 4 times. This happens due to the increasing the thickness of the gas film around the tool, and subsequently increasing the flying sparks which results in higher surface roughness. Increasing the Voltage from 38 to 42V results in 36% enhancement of surface roughness. The 25% electrolyte concentration results in lower surface roughness.

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APA: Copy

TORABI, A., & RAZFAR, M.R.. (2020). Improvement of Surface Integrity of PDMS Micro-channel in the Micro Electrochemical Discharge Milling Process. MODARES MECHANICAL ENGINEERING, 20(11 ), 2605-2615. SID. https://sid.ir/paper/398977/en

Vancouver: Copy

TORABI A., RAZFAR M.R.. Improvement of Surface Integrity of PDMS Micro-channel in the Micro Electrochemical Discharge Milling Process. MODARES MECHANICAL ENGINEERING[Internet]. 2020;20(11 ):2605-2615. Available from: https://sid.ir/paper/398977/en

IEEE: Copy

A. TORABI, and M.R. RAZFAR, “Improvement of Surface Integrity of PDMS Micro-channel in the Micro Electrochemical Discharge Milling Process,” MODARES MECHANICAL ENGINEERING, vol. 20, no. 11 , pp. 2605–2615, 2020, [Online]. Available: https://sid.ir/paper/398977/en

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