MEMS Based Tunable Acceleration Switch Using Two Type Actuators

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Moloudzade Logman; Afrang Saeid; REZAZADEH GHADER

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Journal Paper

Paper Information

Journal: TABRIZ JOURNAL OF ELECTRICAL ENGINEERING Year:2020 | Volume:50 | Issue:1 (91) Page(s): 419-432

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Information Journal Paper

Title

MEMS Based Tunable Acceleration Switch Using Two Type Actuators

Author(s)

Moloudzade Logman | Afrang Saeid | REZAZADEH GHADER | Issue Writer Certificate

Keywords

Acceleration switchQ1

MEMSQ1

piezoelectric actuatorQ1

electrostatic actuatorQ1

tuneQ1

pull inQ1

Abstract

In this paper design and simulation of a new tunable acceleration MEMS switch is proposed. Using the proposed switch, it is possible to measure the accelerations in the range between milli-g and 90g. To tune the desired Acceleration switching, two actuators are used. These actuators are electrostatic comb drive and piezoelectric actuator. The electrostatic comb drive actuator operates in high linear range and the piezoelectric actuator can measure very low accelerations without pull in phenomenon. In the structure, the stopper is used to avoid pull in phenomenon due to the electrostatic actuation. In the piezoelectric actuator section, the governing equations for the deflection due to piezoelectric actuation is extracted. Based on design, the resolution is about 0. 15g. The pull in voltage of electrostatic comb drive actuator is 50 volt and maximum voltage tuning of piezoelectric actuator is 85 volt. To verify, the proposed structure is first calculated using matlab software and then simulated using intellisuite software.

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APA: Copy

Moloudzade, Logman, Afrang, Saeid, & REZAZADEH, GHADER. (2020). MEMS Based Tunable Acceleration Switch Using Two Type Actuators. TABRIZ JOURNAL OF ELECTRICAL ENGINEERING, 50(1 (91) ), 419-432. SID. https://sid.ir/paper/408629/en

Vancouver: Copy

Moloudzade Logman, Afrang Saeid, REZAZADEH GHADER. MEMS Based Tunable Acceleration Switch Using Two Type Actuators. TABRIZ JOURNAL OF ELECTRICAL ENGINEERING[Internet]. 2020;50(1 (91) ):419-432. Available from: https://sid.ir/paper/408629/en

IEEE: Copy

Logman Moloudzade, Saeid Afrang, and GHADER REZAZADEH, “MEMS Based Tunable Acceleration Switch Using Two Type Actuators,” TABRIZ JOURNAL OF ELECTRICAL ENGINEERING, vol. 50, no. 1 (91) , pp. 419–432, 2020, [Online]. Available: https://sid.ir/paper/408629/en

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