ACCURATE DETERMINATION OF PULL-IN VOLTAGE FOR MEMS CAPACITIVE DEVICES WITH CLAMPED SQUARE DIAPHRAGM

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GANJI B.A.; MOUSAVI A.

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Journal Paper

Paper Information

Journal: INTERNATIONAL JOURNAL OF ENGINEERING Year:2012 | Volume:25 | Issue:3 (TRANSACTIONS B: APPLICATIONS) Page(s): 161-166

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Information Journal Paper

Title

ACCURATE DETERMINATION OF PULL-IN VOLTAGE FOR MEMS CAPACITIVE DEVICES WITH CLAMPED SQUARE DIAPHRAGM

Author(s)

GANJI B.A. | MOUSAVI A. | Issue Writer Certificate

Keywords

MEMS

CAPACITIVE DEVICE

PULL-IN VOLTAGE

DIAPHRAGM DEFORMATION

Abstract

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the PULL-IN VOLTAGE for MEMS CAPACITIVE DEVICEs with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped square diaphragm. The capacitor structure has been designed using a low stress doped poly silicon diaphragm with a proposed thickness of 0.8 mm and an area of 2.4 mm2, an air gap of 3.0 mm, and a 1.0 mm thick back plate. The value of PULL-IN VOLTAGE calculated using equation is about 6.85V and the finite element analysis (FEA) results show that the pull-in occurs at 6.75V. The resulting PULL-IN VOLTAGE and deflection profile of the diaphragm are in close agreement with finite element analysis results.

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APA: Copy

GANJI, B.A., & MOUSAVI, A.. (2012). ACCURATE DETERMINATION OF PULL-IN VOLTAGE FOR MEMS CAPACITIVE DEVICES WITH CLAMPED SQUARE DIAPHRAGM. INTERNATIONAL JOURNAL OF ENGINEERING, 25(3 (TRANSACTIONS B: APPLICATIONS)), 161-166. SID. https://sid.ir/paper/595265/en

Vancouver: Copy

GANJI B.A., MOUSAVI A.. ACCURATE DETERMINATION OF PULL-IN VOLTAGE FOR MEMS CAPACITIVE DEVICES WITH CLAMPED SQUARE DIAPHRAGM. INTERNATIONAL JOURNAL OF ENGINEERING[Internet]. 2012;25(3 (TRANSACTIONS B: APPLICATIONS)):161-166. Available from: https://sid.ir/paper/595265/en

IEEE: Copy

B.A. GANJI, and A. MOUSAVI, “ACCURATE DETERMINATION OF PULL-IN VOLTAGE FOR MEMS CAPACITIVE DEVICES WITH CLAMPED SQUARE DIAPHRAGM,” INTERNATIONAL JOURNAL OF ENGINEERING, vol. 25, no. 3 (TRANSACTIONS B: APPLICATIONS), pp. 161–166, 2012, [Online]. Available: https://sid.ir/paper/595265/en

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