Design, analysis and simulation of a capacitive tilt micro-sensor with continuous dynamic range

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Labibi Minoo; MEHRAN MAHDIYEH

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Journal Paper

Paper Information

Journal: ELECTRONIC INDUSTRIES Year:2021 | Volume:11 | Issue:4 Page(s): 85-95

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Information Journal Paper

Title

Design, analysis and simulation of a capacitive tilt micro-sensor with continuous dynamic range

Author(s)

Labibi Minoo | MEHRAN MAHDIYEH | Issue Writer Certificate

Keywords

MEMS

Tilt sensor

micro-sensor

Liquid dielectric

COMSOL Multiphysics

Abstract

In this paper, a new capacitive tilt micro-sensor based on the liquid is designed, analyzed and simulated. This sensor has a cylindrical structure and parallel plates of its capacitors are formed on the two ends of cylinder. Distance between plates is filled equally with the Silicone oil and air. Proposed micro-sensor measures the slope around x-axis. There are three capacitors in the structure of the sensor which have a common plate while other three plates are 60ᵒ sectors of a circle which lie in 60ᵒ apart in a circle. Output of this sensor (out) is defined as a special function of structural capacitors. When cylinder rotates around x-axis, the Silicone oil level remains horizontally while position of the plates with respect to the oil varies. Meanwhile this occurrence changes structural capacitors and consequently (out). In this paper, with a detailed analysis, effect of tilt application to the sensor and its capacitances is drawn using MATLAB. Moreover this structure has been simulated using COMSOL Multiphysics. Obtained simulation and analytical results are in good agreement with each other. Proposed tilt micro-sensor measures the deflection between 0 ° to 360 ° with the sensitivity of 8. 011 fF/deg.

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APA: Copy

Labibi, Minoo, & MEHRAN, MAHDIYEH. (2021). Design, analysis and simulation of a capacitive tilt micro-sensor with continuous dynamic range. ELECTRONIC INDUSTRIES, 11(4 ), 85-95. SID. https://sid.ir/paper/955173/en

Vancouver: Copy

Labibi Minoo, MEHRAN MAHDIYEH. Design, analysis and simulation of a capacitive tilt micro-sensor with continuous dynamic range. ELECTRONIC INDUSTRIES[Internet]. 2021;11(4 ):85-95. Available from: https://sid.ir/paper/955173/en

IEEE: Copy

Minoo Labibi, and MAHDIYEH MEHRAN, “Design, analysis and simulation of a capacitive tilt micro-sensor with continuous dynamic range,” ELECTRONIC INDUSTRIES, vol. 11, no. 4 , pp. 85–95, 2021, [Online]. Available: https://sid.ir/paper/955173/en

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