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Scientific Information Database

ISSN: 2588-4824

Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

Journal Issue Information

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B
Year:1994 | Volume:12 | Issue:5|Papers Count:1

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Title:

SCANNING TUNNELING MICROSCOPE TIP‐INDUCED ANODIZATION OF TITANIUM: CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY

Author(s):

SUGIMURA H. | UCHIDA T. | KITAMURA N.

Journal:

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B

Issue Info:

Year:
1994
Volume:
12
Issue:
5
Pages:
2884-2888

Keywords:

Abstract:

Yearly Impact: مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

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Scientific Information Database

ISSN: 2588-4824

Journal Issue Information

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B Year:1994 | Volume:12 | Issue:5|Papers Count:1

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B
Year:1994 | Volume:12 | Issue:5|Papers Count:1