SCANNING TUNNELING MICROSCOPE TIP‐INDUCED ANODIZATION OF TITANIUM: CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY

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SUGIMURA H.; UCHIDA T.; KITAMURA N.

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Paper Information

Journal: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B Year:1994 | Volume:12 | Issue:5 Page(s): 2884-2888

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Information Journal Paper

Title

SCANNING TUNNELING MICROSCOPE TIP‐INDUCED ANODIZATION OF TITANIUM: CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY

Author(s)

SUGIMURA H. | UCHIDA T. | KITAMURA N. | Issue Writer Certificate

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Abstract

Cites

STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE

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APA: Copy

SUGIMURA, H., UCHIDA, T., & KITAMURA, N.. (1994). SCANNING TUNNELING MICROSCOPE TIP‐INDUCED ANODIZATION OF TITANIUM: CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, 12(5), 2884-2888. SID. https://sid.ir/paper/603390/en

Vancouver: Copy

SUGIMURA H., UCHIDA T., KITAMURA N.. SCANNING TUNNELING MICROSCOPE TIP‐INDUCED ANODIZATION OF TITANIUM: CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B[Internet]. 1994;12(5):2884-2888. Available from: https://sid.ir/paper/603390/en

IEEE: Copy

H. SUGIMURA, T. UCHIDA, and N. KITAMURA, “SCANNING TUNNELING MICROSCOPE TIP‐INDUCED ANODIZATION OF TITANIUM: CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY,” JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, vol. 12, no. 5, pp. 2884–2888, 1994, [Online]. Available: https://sid.ir/paper/603390/en

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