Nanomanipulation and displacement of nanoparticles has found wide applications in various sciences today.One of the basic tools for performing the Nanomanipulation process is the atomic force microscope.Today the atomic force microscope has found various applications, including surface imaging, manipulation and movement of particles, extracting the properties of materials and textures.The manipulation of nanoparticles usually involves two phases.The first phase includes the extraction of the critical force and the critical time before the start of the particle movement.The second phase also includes the investigation of particles during movement during Nano manipulation and displacement.Due to the fact that in micro/Nano dimensions,surface forces are more effective than volume forces,so it is very important to choose the appropriate contact model in modeling and simulating the Nano manipulation process.Various parameters affect contact models on the micro/Nano scale.In this research, the effect of different parameters on Hertz, JKR and DMT contact models has been investigated.For this purpose, in order to investigate the effect of different input parameters, the statistical method of sensitivity analysis called E-fast, which is one of the fast methods,has been used.The input parameters examined in this research include tip radius,volume of the particle,elastic modulus of the tip,elastic modulus of the particle,Poisson's coefficient of the tip and Poisson's coefficient of the particle, as well as penetration depth and force, which are explained as output parameters.The obtained results show that the volume of the target particles and the tip radius have a great influence on the force and depth of penetration in the contact models