CONTROLLED SYNTHESIS OF ORDERED TWO-DIMENSIONAL MICROSTRUCTURES IN REACTIVE HIGH-DENSITY PLASMAS

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MARVI Z.; FOROUTAN GH.

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Journal: IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING Year:2012 | Volume:- | Issue:12 Page(s): 49-60

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Title

CONTROLLED SYNTHESIS OF ORDERED TWO-DIMENSIONAL MICROSTRUCTURES IN REACTIVE HIGH-DENSITY PLASMAS

Author(s)

MARVI Z. | FOROUTAN GH. | Issue Writer Certificate

Keywords

PLASMA SHEATHQ3

DUST NANOPARTICLESQ3

FLUID SIMULATIONQ3

SITE SELECTIVE DEPOSITIONQ3

CARBON NANOTUBESQ3

ACTIVE PLASMASQ3

ORDERED MICROSTRUCTURESQ3

Abstract

This work's aim is to investigate the dynamics of ions, electrons, and charged nanoparticles inside the dusty PLASMA SHEATH, in order to determine the appropriate conditions for the controlled and SITE SELECTIVE DEPOSITION of plasma particles on a pre-patterned substrate of ORDERED MICROSTRUCTURES. The approach used in this study, is the numerical simulation of the fluid equations, describing the dynamics of plasma particles inside the PLASMA SHEATH. The results obtained, show that the focusing effect of the electric field of nanostructures increases with the increasing of the electron number density, leading to the growth of high aspect ratio nanostructures. Increase in the electron temperature, results in the decreasing of the charge of nanoparticles, and consequently in the decreasing of the incident flux on the nanostructures. The enhancement of the number density and Mach number of the nanoparticles, leads to the enhancement of the flux on nanostructures and as a result their growth rate increases. Moreover, the incident flux grows with the increasing of the height and period of micro-pattern. From the present findings it can be concluded that to achieve high deposition rates and nanostructures with a large aspect ratio one should employ a high density, low temperature plasma, large impinging velocity of nanoparticles, and a micro pattern with a relatively large period.

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APA: Copy

MARVI, Z., & FOROUTAN, GH.. (2012). CONTROLLED SYNTHESIS OF ORDERED TWO-DIMENSIONAL MICROSTRUCTURES IN REACTIVE HIGH-DENSITY PLASMAS. IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING, -(12), 49-60. SID. https://sid.ir/paper/121123/en

Vancouver: Copy

MARVI Z., FOROUTAN GH.. CONTROLLED SYNTHESIS OF ORDERED TWO-DIMENSIONAL MICROSTRUCTURES IN REACTIVE HIGH-DENSITY PLASMAS. IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING[Internet]. 2012;-(12):49-60. Available from: https://sid.ir/paper/121123/en

IEEE: Copy

Z. MARVI, and GH. FOROUTAN, “CONTROLLED SYNTHESIS OF ORDERED TWO-DIMENSIONAL MICROSTRUCTURES IN REACTIVE HIGH-DENSITY PLASMAS,” IRANIAN JOURNAL OF SURFACE SCIENCE AND ENGINEERING, vol. -, no. 12, pp. 49–60, 2012, [Online]. Available: https://sid.ir/paper/121123/en

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