CONSTRUCTION AND TESTING OF A HYDROGEN CRACKING CELL

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SAHRA GARD F.

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Journal: Iranian Journal of Physics Research Year:2011 | Volume:11 | Issue:3 Page(s): 335-335

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Information Journal Paper

Title

CONSTRUCTION AND TESTING OF A HYDROGEN CRACKING CELL

Author(s)

SAHRA GARD F. | Issue Writer Certificate

Keywords

DNAQ3

SEMICONDOCTORSQ2

GAASQ2

MBEQ2

XPSQ2

RHEEDQ2

Abstract

A UHV atomic hydrogen-cracking cell has been constructed to produce atomic hydrogen in order to perform in-situ cleaning of semiconductor samples. The cell was calibrated and tested with the objective of cleaning the III-V semiconductor samples such as GAAS.Mass spectroscopy studies during the atomic hydrogen cleaning of the GAAS samples revealed the chemical process of the hydrogen cleaning. X-ray Photoemission Spectroscopy (XPS) was also carried out on the samples at different stages of cleaning. Desorption of the native oxide from GAAS samples resulted in a smooth surface, which was confirmed by Reflection High Energy Electron Diffraction (RHEED).

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APA: Copy

SAHRA GARD, F.. (2011). CONSTRUCTION AND TESTING OF A HYDROGEN CRACKING CELL. IRANIAN JOURNAL OF PHYSICS RESEARCH, 11(3), 335-335. SID. https://sid.ir/paper/1570/en

Vancouver: Copy

SAHRA GARD F.. CONSTRUCTION AND TESTING OF A HYDROGEN CRACKING CELL. IRANIAN JOURNAL OF PHYSICS RESEARCH[Internet]. 2011;11(3):335-335. Available from: https://sid.ir/paper/1570/en

IEEE: Copy

F. SAHRA GARD, “CONSTRUCTION AND TESTING OF A HYDROGEN CRACKING CELL,” IRANIAN JOURNAL OF PHYSICS RESEARCH, vol. 11, no. 3, pp. 335–335, 2011, [Online]. Available: https://sid.ir/paper/1570/en

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