THE INVESTIGATION OF THE EFFECT OF THICKNESS ON THE PROPERTIES OF TITANIUM FILMS CREATED BY THE PROCESS OF DC MAGNETRON SPUTTERING

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AMIRABDOLLAHIAN ALI; AFSHAR ABDOLAH

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Journal: Journal of Advanced Processes in Materials Engineering Year:2011 | Volume:5 | Issue:3 (18) Page(s): 65-71

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Title

THE INVESTIGATION OF THE EFFECT OF THICKNESS ON THE PROPERTIES OF TITANIUM FILMS CREATED BY THE PROCESS OF DC MAGNETRON SPUTTERING

Author(s)

AMIRABDOLLAHIAN ALI | AFSHAR ABDOLAH | Issue Writer Certificate

Keywords

AISI 316L STAINLESS STEELQ3

TITANIUM FILMSQ3

DC MAGNETRON SPUTTERINGQ3

THICKNESSQ2

CORROSION RESISTANCEQ2

Abstract

The aim of this study is to investigate the effect of increasing the THICKNESS on the properties of TITANIUM FILMS created on AISI 316L STAINLESS STEEL substrate by using the process of DC MAGNETRON SPUTTERING. To achieve this, deposition operation in various times 5, 10, 15 and 20 minutes were set to films with different THICKNESSes to create. The THICKNESS of TITANIUM FILMS by using profilometery were measured. The morphology of films by field emission scanning electron microscope (FESEM) were investigated and titanium nanoparticles average size were determined. The topography of TITANIUM FILMS by using atomic force microscope (AFM) were investigated and the amount of average surface roughness of films were determined. In addition, CORROSION RESISTANCE the thickest of created titanium film by potentiodynamic polarization test in SBF physiological solution at 37oC temperature was evaluated and the values of corrosion potential and the corrosion current density were determined. The results of these tests showed that the titanium film with a THICKNESS of 298 nm has the most dence and the most uniform structure and the highest amounts of titanium nanoparticles average size (65 nm) and the average surface roughness (3.767 nm). Also creating titanium film with a THICKNESS of 298 nm on AISI 316L STAINLESS STEEL increases the corrosion potential from -0.313 to -0.279 V and reduced corrosion current density from 451.1 to 163.4 nA/cm2 which resulted to improve CORROSION RESISTANCE.

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References

STUDY OF CORROSION BEHAVIOUR OF TI-COATED AISI 316L STAINLESS STEEL IN A SIMULATED BODY FLUID SOLUTION

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APA: Copy

AMIRABDOLLAHIAN, ALI, & AFSHAR, ABDOLAH. (2011). THE INVESTIGATION OF THE EFFECT OF THICKNESS ON THE PROPERTIES OF TITANIUM FILMS CREATED BY THE PROCESS OF DC MAGNETRON SPUTTERING. ADVANCED PROCESSES IN MATERIALS, 5(3 (18)), 65-71. SID. https://sid.ir/paper/172779/en

Vancouver: Copy

AMIRABDOLLAHIAN ALI, AFSHAR ABDOLAH. THE INVESTIGATION OF THE EFFECT OF THICKNESS ON THE PROPERTIES OF TITANIUM FILMS CREATED BY THE PROCESS OF DC MAGNETRON SPUTTERING. ADVANCED PROCESSES IN MATERIALS[Internet]. 2011;5(3 (18)):65-71. Available from: https://sid.ir/paper/172779/en

IEEE: Copy

ALI AMIRABDOLLAHIAN, and ABDOLAH AFSHAR, “THE INVESTIGATION OF THE EFFECT OF THICKNESS ON THE PROPERTIES OF TITANIUM FILMS CREATED BY THE PROCESS OF DC MAGNETRON SPUTTERING,” ADVANCED PROCESSES IN MATERIALS, vol. 5, no. 3 (18), pp. 65–71, 2011, [Online]. Available: https://sid.ir/paper/172779/en

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