Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS

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Najafi Ashtiani h.

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Journal: Iranian Journal of Physics Research Year:2018 | Volume:18 | Issue:3 Page(s): 427-435

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Title

Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS

Author(s)

Najafi Ashtiani h. | Issue Writer Certificate

Keywords

magnetron sputteringQ1

thin filmQ2

molybdenum oxideQ1

optical propertiesQ1

Abstract

In this study, molybdenum oxide thin films are deposited by using high power impulse magnetic sputtering (HiPIMS) at different pulses length of 60, 90, 120, 150 and 180 μ s on glass substrates in a combination of reactive and non-reactive gases with a ratio of O2/Ar = 0. 66. The structural and optical properties of these coatings are studied. The chemical composition of these metal oxides is determined by analyzing X-ray photoelectron spectroscopy (XPS), and are determined by MoOx stoichiometry with different x-values. By studying the optical properties, it is found that the oxygen deficiency with increasing pulse width cause to reduce the average of optical transmittance and also decrease the optical band gap of coatings.

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APA: Copy

Najafi Ashtiani, h.. (2018). Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS. IRANIAN JOURNAL OF PHYSICS RESEARCH, 18(3 ), 427-435. SID. https://sid.ir/paper/1867/en

Vancouver: Copy

Najafi Ashtiani h.. Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS. IRANIAN JOURNAL OF PHYSICS RESEARCH[Internet]. 2018;18(3 ):427-435. Available from: https://sid.ir/paper/1867/en

IEEE: Copy

h. Najafi Ashtiani, “Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS,” IRANIAN JOURNAL OF PHYSICS RESEARCH, vol. 18, no. 3 , pp. 427–435, 2018, [Online]. Available: https://sid.ir/paper/1867/en

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