FABRICATION AND OPTICAL CHARACTERIZATION OF SILICON NANOSTRUCTURE ARRAYS BY LASER INTERFERENCE LITHOGRAPHY AND METAL-ASSISTED CHEMICAL ETCHING

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NAZOKTABAR MOHSEN; ZAHEDINEJAD MOHAMMAD; HEYDARI PAYAM; ASGHARPOUR ALI REZA

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Journal: JOURNAL OF NANOSTRUCTURES Year:2014 | Volume:4 | Issue:4 Page(s): 419-424

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Title

FABRICATION AND OPTICAL CHARACTERIZATION OF SILICON NANOSTRUCTURE ARRAYS BY LASER INTERFERENCE LITHOGRAPHY AND METAL-ASSISTED CHEMICAL ETCHING

Author(s)

NAZOKTABAR MOHSEN | ZAHEDINEJAD MOHAMMAD | HEYDARI PAYAM | ASGHARPOUR ALI REZA | Issue Writer Certificate

Keywords

PHOTOVOLTAICQ2

LASER INTERFERENCE LITHOGRAPHYQ2

METAL-ASSISTED CHEMICAL ETCHINGQ2

Abstract

In this paper METAL-ASSISTED CHEMICAL ETCHING has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, METAL-ASSISTED CHEMICAL ETCHING (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with LASER INTERFERENCE LITHOGRAPHY (LIL) fabricated different reproducible pillars, holes and rhomboidal structures. As a result, Submicron patterning of porous areas and nanohole arrays on Si substrate with a minimum feature size of 600nm was achieved.Measured reflection spectra of the samples present different optical characteristics which is dependent on the shape, thickness of metal catalyst and periodicity of the structure. These structures can be designed to reach a photonic bandgap in special range or antireflection layer in energy harvesting applications. The resulted reflection spectra of applied method are comparable to conventional expensive and complicated dry etching techniques.

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APA: Copy

NAZOKTABAR, MOHSEN, ZAHEDINEJAD, MOHAMMAD, HEYDARI, PAYAM, & ASGHARPOUR, ALI REZA. (2014). FABRICATION AND OPTICAL CHARACTERIZATION OF SILICON NANOSTRUCTURE ARRAYS BY LASER INTERFERENCE LITHOGRAPHY AND METAL-ASSISTED CHEMICAL ETCHING. JOURNAL OF NANOSTRUCTURES, 4(4), 419-424. SID. https://sid.ir/paper/210906/en

Vancouver: Copy

NAZOKTABAR MOHSEN, ZAHEDINEJAD MOHAMMAD, HEYDARI PAYAM, ASGHARPOUR ALI REZA. FABRICATION AND OPTICAL CHARACTERIZATION OF SILICON NANOSTRUCTURE ARRAYS BY LASER INTERFERENCE LITHOGRAPHY AND METAL-ASSISTED CHEMICAL ETCHING. JOURNAL OF NANOSTRUCTURES[Internet]. 2014;4(4):419-424. Available from: https://sid.ir/paper/210906/en

IEEE: Copy

MOHSEN NAZOKTABAR, MOHAMMAD ZAHEDINEJAD, PAYAM HEYDARI, and ALI REZA ASGHARPOUR, “FABRICATION AND OPTICAL CHARACTERIZATION OF SILICON NANOSTRUCTURE ARRAYS BY LASER INTERFERENCE LITHOGRAPHY AND METAL-ASSISTED CHEMICAL ETCHING,” JOURNAL OF NANOSTRUCTURES, vol. 4, no. 4, pp. 419–424, 2014, [Online]. Available: https://sid.ir/paper/210906/en

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