CONTACT TIME STUDY OF ELECTROSTATICALLY ACTUATED MICROSYSTEMS

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MOGHIMIZAND M.; RASHIDIAN B.; AHMADIAN M.T.

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Journal Paper

Paper Information

Journal: SCIENTIA IRANICA Year:2010 | Volume:17 | Issue:5 (TRANSACTION B: MECHANICAL ENGINEERING) Page(s): 346-357

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Information Journal Paper

Title

CONTACT TIME STUDY OF ELECTROSTATICALLY ACTUATED MICROSYSTEMS

Author(s)

MOGHIMIZAND M. | RASHIDIAN B. | AHMADIAN M.T. | Issue Writer Certificate

Keywords

CONTACT TIME

MULTI-LAYER MICROPLATES

PULL-IN INSTABILITY

SQUEEZE FILM DAMPING

Abstract

This paper presents a model to analyze contact phenomenon in Microsystems actuated by ramp voltages, which has applications in frequency sweeping. First-order shear deformation theory is used to model dynamical system using finite element method, while finite difference method is applied to model SQUEEZE FILM DAMPING. The model is validated by static pull-in results. The presented hybrid FEMFDM model is utilized to compute values of CONTACT TIME and dynamic behavior. Considering this model, effects of different geometrical and mechanical parameters on CONTACT TIME are studied. The incense of imposing the additional reverse voltage on dynamic characteristics of the system is also investigated. It is shown that magnitude and position of applying the reverse voltage is very important in preventing PULL-IN INSTABILITY.

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APA: Copy

MOGHIMIZAND, M., RASHIDIAN, B., & AHMADIAN, M.T.. (2010). CONTACT TIME STUDY OF ELECTROSTATICALLY ACTUATED MICROSYSTEMS. SCIENTIA IRANICA, 17(5 (TRANSACTION B: MECHANICAL ENGINEERING)), 346-357. SID. https://sid.ir/paper/289967/en

Vancouver: Copy

MOGHIMIZAND M., RASHIDIAN B., AHMADIAN M.T.. CONTACT TIME STUDY OF ELECTROSTATICALLY ACTUATED MICROSYSTEMS. SCIENTIA IRANICA[Internet]. 2010;17(5 (TRANSACTION B: MECHANICAL ENGINEERING)):346-357. Available from: https://sid.ir/paper/289967/en

IEEE: Copy

M. MOGHIMIZAND, B. RASHIDIAN, and M.T. AHMADIAN, “CONTACT TIME STUDY OF ELECTROSTATICALLY ACTUATED MICROSYSTEMS,” SCIENTIA IRANICA, vol. 17, no. 5 (TRANSACTION B: MECHANICAL ENGINEERING), pp. 346–357, 2010, [Online]. Available: https://sid.ir/paper/289967/en

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