STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL

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REZAZADEH G.; TAYEFEH REZAEI S.; SAEEDI VAHDAT A.; NASIRZADEH V.

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Journal Paper

Paper Information

Journal: JOURNAL OF SOLID MECHANICS Year:2011 | Volume:3 | Issue:3 Page(s): 271-282

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Title

STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL

Author(s)

REZAZADEH G. | TAYEFEH REZAEI S. | SAEEDI VAHDAT A. | NASIRZADEH V. | Issue Writer Certificate

Keywords

MEMS

INTERNAL DAMPING

QUALITY FACTOR

CIRCULAR MICRO-PLATE

ELECTROSTATIC ACTUATION

Abstract

Thermo elastic damping (TED) in a CIRCULAR MICRO-PLATE resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for different ambient temperatures. Effects of the geometrical parameters on TED and the critical thickness are investigated. Furthermore, the effect of applied bias DC voltage on TED for an electrostatically deflected micro-plate is also investigated.

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APA: Copy

REZAZADEH, G., TAYEFEH REZAEI, S., SAEEDI VAHDAT, A., & NASIRZADEH, V.. (2011). STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL. JOURNAL OF SOLID MECHANICS, 3(3), 271-282. SID. https://sid.ir/paper/319253/en

Vancouver: Copy

REZAZADEH G., TAYEFEH REZAEI S., SAEEDI VAHDAT A., NASIRZADEH V.. STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL. JOURNAL OF SOLID MECHANICS[Internet]. 2011;3(3):271-282. Available from: https://sid.ir/paper/319253/en

IEEE: Copy

G. REZAZADEH, S. TAYEFEH REZAEI, A. SAEEDI VAHDAT, and V. NASIRZADEH, “STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL,” JOURNAL OF SOLID MECHANICS, vol. 3, no. 3, pp. 271–282, 2011, [Online]. Available: https://sid.ir/paper/319253/en

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