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Information Journal Paper

Title

STRUCTURAL PROPERTIES OF POST ANNEALED ITO THIN FILMS AT DIFFERENT TEMPERATURES

Pages

  57-61

Abstract

 Indium tin oxide (ITO) thin films were deposited on glass substrates by RF SPUTTERING using an ITO ceramic target (In2O3-SnO2, 90-10 wt. %). After deposition, samples were annealed at different temperatures in vacuum furnace. The post vacuum annealing effects on the structural, optical and electrical properties of ITO films were investigated. Polycrystalline ITO films have been analyzed in wide optical spectrum, X-ray diffraction and four point probe methods. The results show that increasing the annealing temperature improves the crystallinity of the films. The resistivity of the deposited films is about 19x10-4 Wcm and falls down to 7.3x10-5 Wcm as the annealing temperature is increased to 500oC in vacuum.

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    • Cite

    APA: Copy

    MANAVIZADEH, N., KHODAYARI, A.R., ASL SOLEYMANI, E., BAGHERZADEH, SH., & MALEKI, M.H.. (2009). STRUCTURAL PROPERTIES OF POST ANNEALED ITO THIN FILMS AT DIFFERENT TEMPERATURES. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), 28(2), 57-61. SID. https://sid.ir/paper/557507/en

    Vancouver: Copy

    MANAVIZADEH N., KHODAYARI A.R., ASL SOLEYMANI E., BAGHERZADEH SH., MALEKI M.H.. STRUCTURAL PROPERTIES OF POST ANNEALED ITO THIN FILMS AT DIFFERENT TEMPERATURES. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE)[Internet]. 2009;28(2):57-61. Available from: https://sid.ir/paper/557507/en

    IEEE: Copy

    N. MANAVIZADEH, A.R. KHODAYARI, E. ASL SOLEYMANI, SH. BAGHERZADEH, and M.H. MALEKI, “STRUCTURAL PROPERTIES OF POST ANNEALED ITO THIN FILMS AT DIFFERENT TEMPERATURES,” IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), vol. 28, no. 2, pp. 57–61, 2009, [Online]. Available: https://sid.ir/paper/557507/en

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