CHARACTERIZATION OF NANOSIZED AL2O3POWDER SYNTHESIZED BY THERMAL-ASSISTED MOCVD AND PLASMA-ASSISTED MOCVD

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SHIZHONG HAN; JINGHUI CHEN; PENG ZHENG; PANG QING

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Journal Paper

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Journal: Iranian Journal of Chemistry and Chemical Engineering Year:2011 | Volume:30 | Issue:3 (59) Page(s): 83-88

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Title

CHARACTERIZATION OF NANOSIZED AL2O3POWDER SYNTHESIZED BY THERMAL-ASSISTED MOCVD AND PLASMA-ASSISTED MOCVD

Author(s)

SHIZHONG HAN | JINGHUI CHEN | PENG ZHENG | PANG QING | Issue Writer Certificate

Keywords

NANOSIZED

AL2O3

THERMAL MOCVD

PLASMA

Abstract

NANOSIZED Al2O3 powder is synthesized by thermal Metal Organic Chemical Vapor Deposition (MOCVD) combined with PLASMA. The effects of reaction temperature, pressure, Al (CH3) 3 (TMA) concentration and reactant gases (CO2 and O2) on the characteristics of the synthesized Al2O3 powders are investigated. The experimental results demonstrate that very fine Al2O3 powders with mean particle size of about 2.5 nm can be obtained at 5.3kPa reactor pressure and 1000oC by the THERMAL MOCVD. As the pressure is increased from 5.3kPa to 100 kPa, the mean diameter of Al2O3 powders also reaches to 10 nm. In other words, the increase in pressure has a negative effect on the synthesis of NANOSIZED Al2O3. Meanwhile, it is also observed that the increment of temperature can promote the synthesis of fine Al2O3 powder.

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APA: Copy

SHIZHONG, HAN, JINGHUI, CHEN, PENG, ZHENG, & PANG, QING. (2011). CHARACTERIZATION OF NANOSIZED AL₂O₃POWDER SYNTHESIZED BY THERMAL-ASSISTED MOCVD AND PLASMA-ASSISTED MOCVD. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), 30(3 (59)), 83-88. SID. https://sid.ir/paper/568606/en

Vancouver: Copy

SHIZHONG HAN, JINGHUI CHEN, PENG ZHENG, PANG QING. CHARACTERIZATION OF NANOSIZED AL₂O₃POWDER SYNTHESIZED BY THERMAL-ASSISTED MOCVD AND PLASMA-ASSISTED MOCVD. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE)[Internet]. 2011;30(3 (59)):83-88. Available from: https://sid.ir/paper/568606/en

IEEE: Copy

HAN SHIZHONG, CHEN JINGHUI, ZHENG PENG, and QING PANG, “CHARACTERIZATION OF NANOSIZED AL₂O₃POWDER SYNTHESIZED BY THERMAL-ASSISTED MOCVD AND PLASMA-ASSISTED MOCVD,” IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), vol. 30, no. 3 (59), pp. 83–88, 2011, [Online]. Available: https://sid.ir/paper/568606/en

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