MODELING OF CAPACITANCE AND SENSITIVITY OF A MEMS PRESSURE SENSOR WITH CLAMPED SQUARE DIAPHRAGM

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GANJI B.A.; SHAMS NATERI M.

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Journal Paper

Paper Information

Journal: International Journal of Engineering Year:2013 | Volume:26 | Issue:11 (TRANSACTIONS B: APPLICATIONS) Page(s): 1331-1336

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Information Journal Paper

Title

MODELING OF CAPACITANCE AND SENSITIVITY OF A MEMS PRESSURE SENSOR WITH CLAMPED SQUARE DIAPHRAGM

Author(s)

GANJI B.A. | SHAMS NATERI M. | Issue Writer Certificate

Keywords

MEMS

MODELING

DISPLACEMENT

CAPACITANCE

SENSITIVITY

Abstract

In this paper, for the first time, the MODELING of CAPACITANCE and SENSITIVITY for MEMS capacitive pressure sensor with clamped square diaphragm is presented. In capacitive sensor the SENSITIVITY is proportional to deflection and CAPACITANCE changes with pressure. Therefore, first the diaphragm DISPLACEMENT, CAPACITANCE and SENSITIVITY of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can be seen that the analytical results agree with simulation. The results also show that the high SENSITIVITY can be achieved by decreasing the diaphragm thickness and increasing its size.

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APA: Copy

GANJI, B.A., & SHAMS NATERI, M.. (2013). MODELING OF CAPACITANCE AND SENSITIVITY OF A MEMS PRESSURE SENSOR WITH CLAMPED SQUARE DIAPHRAGM. INTERNATIONAL JOURNAL OF ENGINEERING, 26(11 (TRANSACTIONS B: APPLICATIONS)), 1331-1336. SID. https://sid.ir/paper/609209/en

Vancouver: Copy

GANJI B.A., SHAMS NATERI M.. MODELING OF CAPACITANCE AND SENSITIVITY OF A MEMS PRESSURE SENSOR WITH CLAMPED SQUARE DIAPHRAGM. INTERNATIONAL JOURNAL OF ENGINEERING[Internet]. 2013;26(11 (TRANSACTIONS B: APPLICATIONS)):1331-1336. Available from: https://sid.ir/paper/609209/en

IEEE: Copy

B.A. GANJI, and M. SHAMS NATERI, “MODELING OF CAPACITANCE AND SENSITIVITY OF A MEMS PRESSURE SENSOR WITH CLAMPED SQUARE DIAPHRAGM,” INTERNATIONAL JOURNAL OF ENGINEERING, vol. 26, no. 11 (TRANSACTIONS B: APPLICATIONS), pp. 1331–1336, 2013, [Online]. Available: https://sid.ir/paper/609209/en

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