Information Journal Paper
APA:
CopyCHANG, W.H., SCHELLIN, B., & OBERMEIER, E.. (2006). ELECTROCHEMICAL ETCHING OF N-TYPE 6H-SIC WITHOUT UV ILLUMINATION. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 15(-), 548-552. SID. https://sid.ir/paper/636495/en
Vancouver:
CopyCHANG W.H., SCHELLIN B., OBERMEIER E.. ELECTROCHEMICAL ETCHING OF N-TYPE 6H-SIC WITHOUT UV ILLUMINATION. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[Internet]. 2006;15(-):548-552. Available from: https://sid.ir/paper/636495/en
IEEE:
CopyW.H. CHANG, B. SCHELLIN, and E. OBERMEIER, “ELECTROCHEMICAL ETCHING OF N-TYPE 6H-SIC WITHOUT UV ILLUMINATION,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 15, no. -, pp. 548–552, 2006, [Online]. Available: https://sid.ir/paper/636495/en