EXPERIMENTAL AND NUMERICAL INVESTIGATION OF THE ARMS DISPLACEMENT IN A NEW ELECTROTHERMAL MEMS ACTUATOR

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KOLAHDOOZAN M.; ROUHANI ESFAHANI A.; HASSANI M.

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Journal Paper

Paper Information

Journal: INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY Year:2017 | Volume:10 | Issue:2 Page(s): 71-81

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Title

EXPERIMENTAL AND NUMERICAL INVESTIGATION OF THE ARMS DISPLACEMENT IN A NEW ELECTROTHERMAL MEMS ACTUATOR

Author(s)

KOLAHDOOZAN M. | ROUHANI ESFAHANI A. | HASSANI M. | Issue Writer Certificate

Keywords

ARTIFICIAL NEURAL NETWORK

ELECTROTHERMAL ACTUATOR

FINITE ELEMENT METHOD

MICRO ELECTRO MECHANICAL SYSTEM

Abstract

Microgrippers can be effectively applied for handling, positioning and assembling of the micro components. In the present study, a new design of a U-shape electrothermal microgripper was fabricated and developed with the voltages correspond between 1 to 10 volts. The microgripper was made of silicone with thickness of 25 microns, and pieces between 460 to 480 microns. The proposed microgripper has a simpler design and more facile fabrication comparing to most reported electrothermal microgripper. The behavior of the microgripper was simulated in COMSOL software to measure the displacement of the arms which hold and heat generations during the voltage changes. The present microgripper has more thermal and voltage tolerance comparing to other electrothermal microgripper. Furthermore, the obtained amount of tip displacement for voltage changes is acceptable. Another simulation method based on a three layer ARTIFICIAL NEURAL NETWORK model (ANN) was carried out. Feed forward back propagation algorithm was employed as training algorithm to predict the displacement. The obtained results from both models proved that ANN model had better estimation due to the mean absolute percentage error of 1.024% and determination coefficient of 0.9995. Moreover, they confirm higher capability and accuracy of ANN in prediction of arms displacement compared to FEM.

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APA: Copy

KOLAHDOOZAN, M., ROUHANI ESFAHANI, A., & HASSANI, M.. (2017). EXPERIMENTAL AND NUMERICAL INVESTIGATION OF THE ARMS DISPLACEMENT IN A NEW ELECTROTHERMAL MEMS ACTUATOR. INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY, 10(2), 71-81. SID. https://sid.ir/paper/693359/en

Vancouver: Copy

KOLAHDOOZAN M., ROUHANI ESFAHANI A., HASSANI M.. EXPERIMENTAL AND NUMERICAL INVESTIGATION OF THE ARMS DISPLACEMENT IN A NEW ELECTROTHERMAL MEMS ACTUATOR. INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY[Internet]. 2017;10(2):71-81. Available from: https://sid.ir/paper/693359/en

IEEE: Copy

M. KOLAHDOOZAN, A. ROUHANI ESFAHANI, and M. HASSANI, “EXPERIMENTAL AND NUMERICAL INVESTIGATION OF THE ARMS DISPLACEMENT IN A NEW ELECTROTHERMAL MEMS ACTUATOR,” INTERNATIONAL JOURNAL OF ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY, vol. 10, no. 2, pp. 71–81, 2017, [Online]. Available: https://sid.ir/paper/693359/en

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