Information Journal Paper
APA:
CopyXIE, H.. (2015). ATOMIC FORCE MICROSCOPE CALIPER FOR CRITICAL DIMENSION MEASUREMENTS OF MICRO AND NANOSTRUCTURES THROUGH SIDEWALL SCANNING. ULTRAMICROSCOPY, 158(-), 8-16. SID. https://sid.ir/paper/723129/en
Vancouver:
CopyXIE H.. ATOMIC FORCE MICROSCOPE CALIPER FOR CRITICAL DIMENSION MEASUREMENTS OF MICRO AND NANOSTRUCTURES THROUGH SIDEWALL SCANNING. ULTRAMICROSCOPY[Internet]. 2015;158(-):8-16. Available from: https://sid.ir/paper/723129/en
IEEE:
CopyH. XIE, “ATOMIC FORCE MICROSCOPE CALIPER FOR CRITICAL DIMENSION MEASUREMENTS OF MICRO AND NANOSTRUCTURES THROUGH SIDEWALL SCANNING,” ULTRAMICROSCOPY, vol. 158, no. -, pp. 8–16, 2015, [Online]. Available: https://sid.ir/paper/723129/en