A NEW METHOD FOR INVESTIGATION OF OXYGEN DESORPTION IN PULSED LASER DEPOSITION OF TUNGSTEN OXIDE BY SAMPLING THE TEMPORAL FILM’S RESISTANCE FLUCTUATION IN VACUUM

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irajizad azam; MAHDAVI SEYYED MOHAMMAD

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Seminar Paper

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Seminar: NATIONAL VACUUM CONFERENCE IRAN
Year:2008 | Issue:3

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Title

A NEW METHOD FOR INVESTIGATION OF OXYGEN DESORPTION IN PULSED LASER DEPOSITION OF TUNGSTEN OXIDE BY SAMPLING THE TEMPORAL FILM’S RESISTANCE FLUCTUATION IN VACUUM

Author(s)

irajizad azam | MAHDAVI SEYYED MOHAMMAD

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Abstract

WOX FILMS WERE DEPOSITED BY LASER ABLATION OF WO3 TARGETS AT 250OC TEMPERATURE, 100 MTORR OXYGEN PARTIAL PRESSURE AND 1×10-5 TORR VACUUM. SURFACE CHEMICAL STATES OF DEPOSITS WERE DETERMINED BY X-RAY PHOTOELECTRON SPECTROSCOPY (XPS). RESULTS SHOWED THAT DEPOSITS IN OXYGEN PARTIAL PRESSURE CONTAINS W6+WITH X~3.1, WHILE VACUUM DEPOSITS HAVE DIFFERENT W STATES PERCENTAGE DISTRIBUTION AS W4+> W5+> W6+> W0, AND X~1. WE USED ELECTRICAL RESISTANCE MEASUREMENTS TO STUDY THE SUB-STOICHIOMTRY IN VACUUM DEPOSITION PROCESS. FAST MEASUREMENT OF FILM RESISTANCE IN VACUUM DEPOSITION REVEALED SOME MICROSECOND FLUCTUATIONS MODULATED ON THE TIME VARIATION CURVE OF ELECTRICAL RESISTANCE.

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APA: Copy

irajizad, azam, & MAHDAVI, SEYYED MOHAMMAD. (2008). A NEW METHOD FOR INVESTIGATION OF OXYGEN DESORPTION IN PULSED LASER DEPOSITION OF TUNGSTEN OXIDE BY SAMPLING THE TEMPORAL FILM’S RESISTANCE FLUCTUATION IN VACUUM. NATIONAL VACUUM CONFERENCE IRAN. SID. https://sid.ir/paper/905414/en

Vancouver: Copy

irajizad azam, MAHDAVI SEYYED MOHAMMAD. A NEW METHOD FOR INVESTIGATION OF OXYGEN DESORPTION IN PULSED LASER DEPOSITION OF TUNGSTEN OXIDE BY SAMPLING THE TEMPORAL FILM’S RESISTANCE FLUCTUATION IN VACUUM. 2008. Available from: https://sid.ir/paper/905414/en

IEEE: Copy

azam irajizad, and SEYYED MOHAMMAD MAHDAVI, “A NEW METHOD FOR INVESTIGATION OF OXYGEN DESORPTION IN PULSED LASER DEPOSITION OF TUNGSTEN OXIDE BY SAMPLING THE TEMPORAL FILM’S RESISTANCE FLUCTUATION IN VACUUM,” presented at the NATIONAL VACUUM CONFERENCE IRAN. 2008, [Online]. Available: https://sid.ir/paper/905414/en

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