DESIGN AND OPTIMIZATION OF A MICROMACHINED THERMAL CONVECTIVE ACCELEROMETER

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MAGHSOUDI M.; Aryafar M.; HAMEDI M.

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

Seminar Paper

Paper Information

Seminar: INTERNATIONAL CONFERENCE ON MEMS AND MICROFABRICATION (ICMEMS)
Year:2014 | Issue:1

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Title

DESIGN AND OPTIMIZATION OF A MICROMACHINED THERMAL CONVECTIVE ACCELEROMETER

Author(s)

MAGHSOUDI M. | Aryafar M. | HAMEDI M. | Issue Writer Certificate

Keywords

THERMAL SENSOR

CONVECTIVE ACCELEROMETER

MEMS

DESIGN OF EXPERIMENT

Abstract

THIS PAPER DEALS WITH DESIGN AND OPTIMIZATION OF A MICROMACHINED THERMAL CONVECTIVE ACCELEROMETER. THE ACCELERATION INDUCED THERMAL EXCHANGE DUE TO CONVECTION BETWEEN HOT BUBBLE OF AIR AND SENSOR WILL GENERATE TEMPERATURE GRADIENT AND CONSEQUENTLY THE VOLTAGE SIGNAL IS EMERGED. IN THIS WORK A 2D FE-MODEL IS PROVIDED FOR CALCULATION OF TEMPERATURE DIFFERENCE OF DETECTORS. THE MOST EFFECTIVE PARAMETERS ON SENSOR PERFORMANCE ARE IDENTIFIED AND THE SENSOR IS OPTIMIZED CONSIDERING MULTI OBJECTS (I.E. SENSITIVITY AND NON-LINEARITY) VIA DOE FULL FACTORIAL METHOD. NOVEL PARAMETRIC DESIGN IN COMSOL ENVIRONMENT AND PROGRAMMING IN MATLAB HELPED TO PERFORM NUMEROUS SIMULATIONS NEEDED FOR FULL FACTORIAL EXPERIMENT WHICH ALLOWS TO PROFOUNDLY UNDERSTAND THE EFFECT OF EACH PARAMETER AND SPECIALLY THEIR INTEGRATION. COUPLED THERMO-ELECTRO MECHANICAL SIMULATION IS CONDUCTED IN ORDER TO ASSUME THE POWER CONSUMPTION OF ALL UNDERSTUDY CASE CONSISTENT.THE OPTIMUM DESIGNED SENSOR HAS SENSITIVITY AS HIGH AS 0.48 (DT/G), NON-LINEARITY LESS THAN %10 IN THE RANGE OF ACCELERATION OF [0-120] G WITH HEATER TEMPERATURE OF 630OK.

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APA: Copy

MAGHSOUDI, M., Aryafar, M., & HAMEDI, M.. (2014). DESIGN AND OPTIMIZATION OF A MICROMACHINED THERMAL CONVECTIVE ACCELEROMETER. INTERNATIONAL CONFERENCE ON MEMS AND MICROFABRICATION (ICMEMS). SID. https://sid.ir/paper/940839/en

Vancouver: Copy

MAGHSOUDI M., Aryafar M., HAMEDI M.. DESIGN AND OPTIMIZATION OF A MICROMACHINED THERMAL CONVECTIVE ACCELEROMETER. 2014. Available from: https://sid.ir/paper/940839/en

IEEE: Copy

M. MAGHSOUDI, M. Aryafar, and M. HAMEDI, “DESIGN AND OPTIMIZATION OF A MICROMACHINED THERMAL CONVECTIVE ACCELEROMETER,” presented at the INTERNATIONAL CONFERENCE ON MEMS AND MICROFABRICATION (ICMEMS). 2014, [Online]. Available: https://sid.ir/paper/940839/en

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